Fabrication and Characterization of Cu-doped ZnO Films using rf Reactive Magnetron Sputtering
ZnO thin films have emerged as an interesting research area owing to its useful properties. Recently, lots of attention have been attracted to doped ZnO with Cu atom due to its favourable potential in semiconductor devices. Pure and Cu-doped ZnO (CZO) thin films were deposited on the glass, p-GaN/AI...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2017
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| Subjects: | |
| Online Access: | http://eprints.usm.my/48834/1/ZH17_OP09.pdf%20done.pdf http://eprints.usm.my/48834/ |
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