Effect of Films Thickness on the Surface and Structural Properties of InN Films Grown on Flexible Substrate
In this study, indium nitride (InN) thin films were grown on flexible substrate by radio fi·equency reactive sputtering technique. An indium target with purity of99.999% was used. Throughout this work, the RF power and the gas ratio of argon and nitrogen were maintained constant at 60 W and 40:60...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2016
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| Subjects: | |
| Online Access: | http://eprints.usm.my/48786/1/NG6.pdf%20done.pdf http://eprints.usm.my/48786/ |
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