Cover Image

Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis

Squeeze film damping due to the air trapped between oscillating membrane structure and a fixed substrate is a critical consideration in the design of MEMS devices because it can adversely affect the dynamic behaviour of the system. Therefore, the development of MEMS depends highly on the modelling a...

Full description

Saved in:
Bibliographic Details
Main Author: Harun, Muhammad Syakir
Format: Thesis
Language:English
Published: 2013
Subjects:
TJ1-1570 Mechanical engineering and machinery
Online Access:http://eprints.usm.my/46067/1/Muhammad%20Syakir%20Bin%20Harun.pdf
http://eprints.usm.my/46067/
Tags: Add Tag
No Tags, Be the first to tag this record!
id my.usm.eprints.46067
record_format eprints
spelling my.usm.eprints.46067 http://eprints.usm.my/46067/ Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis Harun, Muhammad Syakir TJ1-1570 Mechanical engineering and machinery Squeeze film damping due to the air trapped between oscillating membrane structure and a fixed substrate is a critical consideration in the design of MEMS devices because it can adversely affect the dynamic behaviour of the system. Therefore, the development of MEMS depends highly on the modelling and numerical simulation in order to optimize and verify their design before the batch production process. In this thesis, a method to model squeeze film damping with finite element approach to attain sufficiently high accuracy while considerably reducing the degrees of freedom is proposed, and its effectiveness is studied by comparing with other methods. The numerical analysis was performed using commercial ANSYS software. The structures were modelled using three-dimensional (3D) element and two-dimensional (2D) element. Results obtained by finite element models are compared with existing experimental measurements and analytical solutions. It was found that for the computation of damping coefficient, two-dimensional model yields slightly similar accuracy with three-dimensional model with respect to experimental data for low number of holes. In contrast, for highly perforated membranes, the proposed two-dimensional model is shown to be more accurate. The results clearly validate the proposed model to achieve good accuracy for damping coefficient solution while consuming considerably less computer time and memory. 2013-12 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/46067/1/Muhammad%20Syakir%20Bin%20Harun.pdf Harun, Muhammad Syakir (2013) Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis. Masters thesis, Universiti Sains Malaysia.
institution Universiti Sains Malaysia
building Hamzah Sendut Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Sains Malaysia
content_source USM Institutional Repository
url_provider http://eprints.usm.my/
language English
topic TJ1-1570 Mechanical engineering and machinery
spellingShingle TJ1-1570 Mechanical engineering and machinery
Harun, Muhammad Syakir
Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis
description Squeeze film damping due to the air trapped between oscillating membrane structure and a fixed substrate is a critical consideration in the design of MEMS devices because it can adversely affect the dynamic behaviour of the system. Therefore, the development of MEMS depends highly on the modelling and numerical simulation in order to optimize and verify their design before the batch production process. In this thesis, a method to model squeeze film damping with finite element approach to attain sufficiently high accuracy while considerably reducing the degrees of freedom is proposed, and its effectiveness is studied by comparing with other methods. The numerical analysis was performed using commercial ANSYS software. The structures were modelled using three-dimensional (3D) element and two-dimensional (2D) element. Results obtained by finite element models are compared with existing experimental measurements and analytical solutions. It was found that for the computation of damping coefficient, two-dimensional model yields slightly similar accuracy with three-dimensional model with respect to experimental data for low number of holes. In contrast, for highly perforated membranes, the proposed two-dimensional model is shown to be more accurate. The results clearly validate the proposed model to achieve good accuracy for damping coefficient solution while consuming considerably less computer time and memory.
format Thesis
author Harun, Muhammad Syakir
author_facet Harun, Muhammad Syakir
author_sort Harun, Muhammad Syakir
title Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis
title_short Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis
title_full Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis
title_fullStr Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis
title_full_unstemmed Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis
title_sort study on the accuracy of squeeze film damping calculation with finite element analysis
publishDate 2013
url http://eprints.usm.my/46067/1/Muhammad%20Syakir%20Bin%20Harun.pdf
http://eprints.usm.my/46067/
_version_ 1657488808000618496
score 13.211869

Similar Items