SU-8 Piezoresistive Microcantilever For Chemical Sensing Application
In this research, the ultraviolet (UV) patternable polymer material, SU-8 with very low Young’s modulus compared to conventional silicon based material, is utilized as structural material for microcantilever to enhance the piezoresistive strain. In addition to that, a thorough Finite Element Analys...
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| 第一著者: | |
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| フォーマット: | 学位論文 |
| 言語: | English |
| 出版事項: |
2011
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| 主題: | |
| オンライン･アクセス: | http://eprints.usm.my/41933/1/LEE_KOK_SIONG.pdf http://eprints.usm.my/41933/ |
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| 要約: | In this research, the ultraviolet (UV) patternable polymer material, SU-8 with very low Young’s modulus compared to conventional silicon based material, is utilized as
structural material for microcantilever to enhance the piezoresistive strain. In addition to that, a thorough Finite Element Analysis (FEA) has been carried out for SU-8 piezoresistive microcantilever under the surface stress loading to help in improving the piezoresistive strain when designing the cantilever sensor. The analysis result concluded that the SU-8 cantilevers for chemical sensing should have lower length to width (L/W) ratio for higher
piezoresistive strain. |
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