Determination of argon fluoride (ArF) excimer laser system and materials diagnosis
The growing interest in precise fabrication of micro and nano-structures such as optical component, lenses, sensor and devices makes the conventional approach no longer satisfactory for micro scale structure. Now, nano-technology has a big potential to revolutionize everything from medicine, indust...
Saved in:
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Book Section |
| Language: | English |
| Published: |
Penerbit Universiti Sains Malaysia
2004
|
| Subjects: | |
| Online Access: | http://eprints.usm.my/41886/1/pAMN06.pdf http://eprints.usm.my/41886/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!