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ISFET for pH Sensor

ISFET is an ion sensitive field effect transistor that has similar structure to the MOSFET. The physical difference of the ISFET structure is the replacement of the gate electrode of the MOSFET by the series of combination of the reference electrode, electrolyte and ion sensitive layer. For this...

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Main Author: M.N. Haron
Format: Conference Paper
Language:English
Published: 2013
Subjects:
ISFET > MOSFET > pH Sensor > Ionic Sensing
Online Access:http://ddms.usim.edu.my/handle/123456789/6126
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spelling my.usim-61262015-07-03T01:07:12Z ISFET for pH Sensor M.N. Haron ISFET--MOSFET--pH Sensor--Ionic Sensing ISFET is an ion sensitive field effect transistor that has similar structure to the MOSFET. The physical difference of the ISFET structure is the replacement of the gate electrode of the MOSFET by the series of combination of the reference electrode, electrolyte and ion sensitive layer. For this device, Silicon Nitride is used as a pH sensing membrane which behaves as a gate in contact with the liquid solution that is biased with a reference electrode. In overall fabrication process, 6 masking level are employed with 12 main processes are involved. In MOSFET principle, the operation was controlled by the gate electrode, meanwhile the operation of ISFET was controlled by the ion concentration in the electrolyte. The measurement of the threshold voltage of the ISFETs will give the pH value of the solution and in general will serve as a pH measurement system. 2013-01-04T08:02:12Z 2013-01-04T08:02:12Z 2013-01-04 Conference Paper http://ddms.usim.edu.my/handle/123456789/6126 en
institution Universiti Sains Islam Malaysia
building USIM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universit Sains Islam i Malaysia
content_source USIM Institutional Repository
url_provider http://ddms.usim.edu.my/
language English
topic ISFET--MOSFET--pH Sensor--Ionic Sensing
spellingShingle ISFET--MOSFET--pH Sensor--Ionic Sensing
M.N. Haron
ISFET for pH Sensor
description ISFET is an ion sensitive field effect transistor that has similar structure to the MOSFET. The physical difference of the ISFET structure is the replacement of the gate electrode of the MOSFET by the series of combination of the reference electrode, electrolyte and ion sensitive layer. For this device, Silicon Nitride is used as a pH sensing membrane which behaves as a gate in contact with the liquid solution that is biased with a reference electrode. In overall fabrication process, 6 masking level are employed with 12 main processes are involved. In MOSFET principle, the operation was controlled by the gate electrode, meanwhile the operation of ISFET was controlled by the ion concentration in the electrolyte. The measurement of the threshold voltage of the ISFETs will give the pH value of the solution and in general will serve as a pH measurement system.
format Conference Paper
author M.N. Haron
author_facet M.N. Haron
author_sort M.N. Haron
title ISFET for pH Sensor
title_short ISFET for pH Sensor
title_full ISFET for pH Sensor
title_fullStr ISFET for pH Sensor
title_full_unstemmed ISFET for pH Sensor
title_sort isfet for ph sensor
publishDate 2013
url http://ddms.usim.edu.my/handle/123456789/6126
_version_ 1645151813944475648
score 13.222552

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