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Capacitive pressure sensors based on MEMS, operating in harsh environments

Poly-crystalline silicon carbide (polysic) Micro-electromechanical systems (MEMS) capacitive pressure sensors operating at harsh environments (e.g. high temperature) are proposed because of SiC owing excellent electrical stability, mechanical robustness, and chemical inertness properties. The princi...

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Main Authors: Hezarjaribi, Yadollah, Hamidon, Mohd Nizar, Keshmiri, Sayyed Hossein, Bahadorimehr, Alireza
Format: Conference or Workshop Item
Language:English
Published: IEEE 2008
Online Access:http://psasir.upm.edu.my/id/eprint/69674/1/Capacitive%20pressure%20sensors%20based%20on%20MEMS%2C%20operating%20in%20harsh%20environments.pdf
http://psasir.upm.edu.my/id/eprint/69674/
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spelling my.upm.eprints.696742019-07-08T02:45:02Z http://psasir.upm.edu.my/id/eprint/69674/ Capacitive pressure sensors based on MEMS, operating in harsh environments Hezarjaribi, Yadollah Hamidon, Mohd Nizar Keshmiri, Sayyed Hossein Bahadorimehr, Alireza Poly-crystalline silicon carbide (polysic) Micro-electromechanical systems (MEMS) capacitive pressure sensors operating at harsh environments (e.g. high temperature) are proposed because of SiC owing excellent electrical stability, mechanical robustness, and chemical inertness properties. The principle of this paper is, design, simulation. The application of SiC pressure sensors are in a harsh environments such as automotive industries, aerospace, oil/logging equipments, nuclear station, power station. The sensor demonstrated a high temperature sensing capability up to 400degC, the device achieves a linear characteristic response and consists of a circular clamped-edges poly-sic diaphragm suspended over sealed cavity on a silicon carbide substrate. The sensor is operating in touch mode capacitive pressure sensor, The advantages of a touch mode are the robust structure that make the sensor to withstand harsh environment, near linear output, and large over-range protection, operating in wide range of pressure, higher sensitivity than the near linear operation in normal mode, so in this case some of stray capacitance effects can be neglected. IEEE 2008 Conference or Workshop Item PeerReviewed text en http://psasir.upm.edu.my/id/eprint/69674/1/Capacitive%20pressure%20sensors%20based%20on%20MEMS%2C%20operating%20in%20harsh%20environments.pdf Hezarjaribi, Yadollah and Hamidon, Mohd Nizar and Keshmiri, Sayyed Hossein and Bahadorimehr, Alireza (2008) Capacitive pressure sensors based on MEMS, operating in harsh environments. In: 2008 IEEE International Conference on Semiconductor Electronics (ICSE 2008), 25-27 Nov. 2008, Johor Bahru, Malaysia. (pp. 184-187). 10.1109/SMELEC.2008.4770304
institution Universiti Putra Malaysia
building UPM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Putra Malaysia
content_source UPM Institutional Repository
url_provider http://psasir.upm.edu.my/
language English
description Poly-crystalline silicon carbide (polysic) Micro-electromechanical systems (MEMS) capacitive pressure sensors operating at harsh environments (e.g. high temperature) are proposed because of SiC owing excellent electrical stability, mechanical robustness, and chemical inertness properties. The principle of this paper is, design, simulation. The application of SiC pressure sensors are in a harsh environments such as automotive industries, aerospace, oil/logging equipments, nuclear station, power station. The sensor demonstrated a high temperature sensing capability up to 400degC, the device achieves a linear characteristic response and consists of a circular clamped-edges poly-sic diaphragm suspended over sealed cavity on a silicon carbide substrate. The sensor is operating in touch mode capacitive pressure sensor, The advantages of a touch mode are the robust structure that make the sensor to withstand harsh environment, near linear output, and large over-range protection, operating in wide range of pressure, higher sensitivity than the near linear operation in normal mode, so in this case some of stray capacitance effects can be neglected.
format Conference or Workshop Item
author Hezarjaribi, Yadollah
Hamidon, Mohd Nizar
Keshmiri, Sayyed Hossein
Bahadorimehr, Alireza
spellingShingle Hezarjaribi, Yadollah
Hamidon, Mohd Nizar
Keshmiri, Sayyed Hossein
Bahadorimehr, Alireza
Capacitive pressure sensors based on MEMS, operating in harsh environments
author_facet Hezarjaribi, Yadollah
Hamidon, Mohd Nizar
Keshmiri, Sayyed Hossein
Bahadorimehr, Alireza
author_sort Hezarjaribi, Yadollah
title Capacitive pressure sensors based on MEMS, operating in harsh environments
title_short Capacitive pressure sensors based on MEMS, operating in harsh environments
title_full Capacitive pressure sensors based on MEMS, operating in harsh environments
title_fullStr Capacitive pressure sensors based on MEMS, operating in harsh environments
title_full_unstemmed Capacitive pressure sensors based on MEMS, operating in harsh environments
title_sort capacitive pressure sensors based on mems, operating in harsh environments
publisher IEEE
publishDate 2008
url http://psasir.upm.edu.my/id/eprint/69674/1/Capacitive%20pressure%20sensors%20based%20on%20MEMS%2C%20operating%20in%20harsh%20environments.pdf
http://psasir.upm.edu.my/id/eprint/69674/
_version_ 1643839551696797696
score 13.211869

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