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Development of nanocrystalline laser ablated thick film array gas sensor

A multi-layer thick film array sensor for gas sensing application including heater element, insulator layer, and interdigitated electrodes was designed and fabricated on alumina substrate. Tin dioxide and platinum nanopowder were used in the pellet form as the active and catalyst layers, respectivel...

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Main Authors: Abadi, Mohammad Hadi Nezhad Shahrokh, Hamidon, Mohd Nizar, Shaari, Abdul Halim, Abdullah, Norhafizah, Wagiran, Rahman, Misron, Norhisam
Format: Conference or Workshop Item
Language:English
Published: IEEE 2010
Online Access:http://psasir.upm.edu.my/id/eprint/68162/1/Development%20of%20nanocrystalline%20laser%20ablated%20thick%20film%20array%20gas%20sensor.pdf
http://psasir.upm.edu.my/id/eprint/68162/
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spelling my.upm.eprints.681622019-05-09T01:44:54Z http://psasir.upm.edu.my/id/eprint/68162/ Development of nanocrystalline laser ablated thick film array gas sensor Abadi, Mohammad Hadi Nezhad Shahrokh Hamidon, Mohd Nizar Shaari, Abdul Halim Abdullah, Norhafizah Wagiran, Rahman Misron, Norhisam A multi-layer thick film array sensor for gas sensing application including heater element, insulator layer, and interdigitated electrodes was designed and fabricated on alumina substrate. Tin dioxide and platinum nanopowder were used in the pellet form as the active and catalyst layers, respectively. Pulse laser ablation deposition (PLAD) technique was used to deposit the sensitive layer onto the electrode part of each sensor. Microstructural and morphological properties of the sensor surface were determined. Sensors were exposed to wood smoke and their sensitivity were measured and compared with the results of the sensors without catalyst layer. IEEE 2010 Conference or Workshop Item PeerReviewed text en http://psasir.upm.edu.my/id/eprint/68162/1/Development%20of%20nanocrystalline%20laser%20ablated%20thick%20film%20array%20gas%20sensor.pdf Abadi, Mohammad Hadi Nezhad Shahrokh and Hamidon, Mohd Nizar and Shaari, Abdul Halim and Abdullah, Norhafizah and Wagiran, Rahman and Misron, Norhisam (2010) Development of nanocrystalline laser ablated thick film array gas sensor. In: 2010 IEEE International Conference on Semiconductor Electronics (ICSE 2010), 28-30 June 2010, Melaka, Malaysia. (pp. 88-91). 10.1109/SMELEC.2010.5549421
institution Universiti Putra Malaysia
building UPM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Putra Malaysia
content_source UPM Institutional Repository
url_provider http://psasir.upm.edu.my/
language English
description A multi-layer thick film array sensor for gas sensing application including heater element, insulator layer, and interdigitated electrodes was designed and fabricated on alumina substrate. Tin dioxide and platinum nanopowder were used in the pellet form as the active and catalyst layers, respectively. Pulse laser ablation deposition (PLAD) technique was used to deposit the sensitive layer onto the electrode part of each sensor. Microstructural and morphological properties of the sensor surface were determined. Sensors were exposed to wood smoke and their sensitivity were measured and compared with the results of the sensors without catalyst layer.
format Conference or Workshop Item
author Abadi, Mohammad Hadi Nezhad Shahrokh
Hamidon, Mohd Nizar
Shaari, Abdul Halim
Abdullah, Norhafizah
Wagiran, Rahman
Misron, Norhisam
spellingShingle Abadi, Mohammad Hadi Nezhad Shahrokh
Hamidon, Mohd Nizar
Shaari, Abdul Halim
Abdullah, Norhafizah
Wagiran, Rahman
Misron, Norhisam
Development of nanocrystalline laser ablated thick film array gas sensor
author_facet Abadi, Mohammad Hadi Nezhad Shahrokh
Hamidon, Mohd Nizar
Shaari, Abdul Halim
Abdullah, Norhafizah
Wagiran, Rahman
Misron, Norhisam
author_sort Abadi, Mohammad Hadi Nezhad Shahrokh
title Development of nanocrystalline laser ablated thick film array gas sensor
title_short Development of nanocrystalline laser ablated thick film array gas sensor
title_full Development of nanocrystalline laser ablated thick film array gas sensor
title_fullStr Development of nanocrystalline laser ablated thick film array gas sensor
title_full_unstemmed Development of nanocrystalline laser ablated thick film array gas sensor
title_sort development of nanocrystalline laser ablated thick film array gas sensor
publisher IEEE
publishDate 2010
url http://psasir.upm.edu.my/id/eprint/68162/1/Development%20of%20nanocrystalline%20laser%20ablated%20thick%20film%20array%20gas%20sensor.pdf
http://psasir.upm.edu.my/id/eprint/68162/
_version_ 1643839119369961472
score 13.211869

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