Cover Image

Pressure sensors based on MEMS, operating in harsh environments (touch-mode)

In this paper, Poly-crystalline silicon carbide (poly-sic) Micro-electromechanical systems (MEMS) capacitive pressure sensor operating in harsh environment in touch mode is proposed, The principle of the paper is to design, obtain analytical solution and compare the results with the simulation for a...

Full description

Saved in:
Bibliographic Details
Main Authors: Hezarjaribi, Yadollah, Hamidon, Mohd Nizar, Bahadorimehr, Alireza
Format: Conference or Workshop Item
Language:English
Published: IEEE 2008
Online Access:http://psasir.upm.edu.my/id/eprint/45889/1/Pressure%20sensors%20based%20on%20MEMS%2C%20operating%20in%20harsh%20environments%20%28touch-mode%29.pdf
http://psasir.upm.edu.my/id/eprint/45889/
Tags: Add Tag
No Tags, Be the first to tag this record!
id my.upm.eprints.45889
record_format eprints
spelling my.upm.eprints.458892020-08-10T02:22:37Z http://psasir.upm.edu.my/id/eprint/45889/ Pressure sensors based on MEMS, operating in harsh environments (touch-mode) Hezarjaribi, Yadollah Hamidon, Mohd Nizar Bahadorimehr, Alireza In this paper, Poly-crystalline silicon carbide (poly-sic) Micro-electromechanical systems (MEMS) capacitive pressure sensor operating in harsh environment in touch mode is proposed, The principle of the paper is to design, obtain analytical solution and compare the results with the simulation for a circular diaphragm deflection before and after touch point. The sensor demonstrated a high temperature sensing capability up to 400°C, the device achieves a linear characteristic response and consists of a circular clamped-edges poly-sic diaphragm suspended over sealed cavity on a silicon carbide substrate. The sensor is operating in touch mode capacitive pressure sensor, The advantages of a touch mode are the robust structure that make the sensor to withstand harsh environment, near linear output, and large over-range protection, operating in wide range of pressure, higher sensitivity than the near linear operation in normal mode, The material is considered to be used for harsh environment is SiC (Silicon Carbide), Because of SiC owing excellent electrical stability, mechanical robustness, and chemical inertness properties and the application of pressure sensors in harsh environments are, such as automotive industries, aerospace, oil/logging equipments, nuclear station, and power station. We are simulating MEMS capacitive pressure sensor to optimize the design, improve the performance and reduce the time of fabricating process of the device. The proposed touch mode MEMS capacitive pressure sensor demonstrated diaphragm ranging from 150 μm to 360 μm in diameter, with the gap depth from 0.5 μm to 7.5 μm and the sensor exhibit a linear response with pressure from 0.05 Mpa to 10 Mpa. IEEE 2008 Conference or Workshop Item PeerReviewed text en http://psasir.upm.edu.my/id/eprint/45889/1/Pressure%20sensors%20based%20on%20MEMS%2C%20operating%20in%20harsh%20environments%20%28touch-mode%29.pdf Hezarjaribi, Yadollah and Hamidon, Mohd Nizar and Bahadorimehr, Alireza (2008) Pressure sensors based on MEMS, operating in harsh environments (touch-mode). In: 33rd IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT 2008), 4-6 Nov. 2008, Penang, Malaysia. . 10.1109/IEMT.2008.5507791
institution Universiti Putra Malaysia
building UPM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Putra Malaysia
content_source UPM Institutional Repository
url_provider http://psasir.upm.edu.my/
language English
description In this paper, Poly-crystalline silicon carbide (poly-sic) Micro-electromechanical systems (MEMS) capacitive pressure sensor operating in harsh environment in touch mode is proposed, The principle of the paper is to design, obtain analytical solution and compare the results with the simulation for a circular diaphragm deflection before and after touch point. The sensor demonstrated a high temperature sensing capability up to 400°C, the device achieves a linear characteristic response and consists of a circular clamped-edges poly-sic diaphragm suspended over sealed cavity on a silicon carbide substrate. The sensor is operating in touch mode capacitive pressure sensor, The advantages of a touch mode are the robust structure that make the sensor to withstand harsh environment, near linear output, and large over-range protection, operating in wide range of pressure, higher sensitivity than the near linear operation in normal mode, The material is considered to be used for harsh environment is SiC (Silicon Carbide), Because of SiC owing excellent electrical stability, mechanical robustness, and chemical inertness properties and the application of pressure sensors in harsh environments are, such as automotive industries, aerospace, oil/logging equipments, nuclear station, and power station. We are simulating MEMS capacitive pressure sensor to optimize the design, improve the performance and reduce the time of fabricating process of the device. The proposed touch mode MEMS capacitive pressure sensor demonstrated diaphragm ranging from 150 μm to 360 μm in diameter, with the gap depth from 0.5 μm to 7.5 μm and the sensor exhibit a linear response with pressure from 0.05 Mpa to 10 Mpa.
format Conference or Workshop Item
author Hezarjaribi, Yadollah
Hamidon, Mohd Nizar
Bahadorimehr, Alireza
spellingShingle Hezarjaribi, Yadollah
Hamidon, Mohd Nizar
Bahadorimehr, Alireza
Pressure sensors based on MEMS, operating in harsh environments (touch-mode)
author_facet Hezarjaribi, Yadollah
Hamidon, Mohd Nizar
Bahadorimehr, Alireza
author_sort Hezarjaribi, Yadollah
title Pressure sensors based on MEMS, operating in harsh environments (touch-mode)
title_short Pressure sensors based on MEMS, operating in harsh environments (touch-mode)
title_full Pressure sensors based on MEMS, operating in harsh environments (touch-mode)
title_fullStr Pressure sensors based on MEMS, operating in harsh environments (touch-mode)
title_full_unstemmed Pressure sensors based on MEMS, operating in harsh environments (touch-mode)
title_sort pressure sensors based on mems, operating in harsh environments (touch-mode)
publisher IEEE
publishDate 2008
url http://psasir.upm.edu.my/id/eprint/45889/1/Pressure%20sensors%20based%20on%20MEMS%2C%20operating%20in%20harsh%20environments%20%28touch-mode%29.pdf
http://psasir.upm.edu.my/id/eprint/45889/
_version_ 1675328741253840896
score 13.211869

Similar Items