Design and analysis of capacitive comb acceleration sensor for automotive applications
In the semiconductor industry, many electrical and electronic applications have been scaled down to the micron and nano scale using various technologies such as VLSI. This can be observed in Moore’s Law where more and more transistors have been fabricated into a single silicon wafer. While integrate...
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| 主要な著者: | , , |
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| フォーマット: | Conference or Workshop Item |
| 言語: | English |
| 出版事項: |
The Society of Digital Information and Wireless Communications (SDIWC)
2014
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| オンライン･アクセス: | http://psasir.upm.edu.my/id/eprint/39757/1/39757.pdf http://psasir.upm.edu.my/id/eprint/39757/ http://sdiwc.net/digital-library/web-admin/upload-pdf/00000970.pdf. |
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