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Theoretical formulation to evaluate capacitance for before and after touch point MEMS capacitive pressure sensors

Micro-electromechanical systems (MEMS) have received a great deal of attention in recent years. This is due to the great promise of increased miniaturization and Performance of MEMS devices over conventional devices. MEMS pressure sensors currently dominate the market for greater than atmospheric pr...

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Main Authors: Hezarjaribi, Yadollah, Hamidon, Mohd Nizar
Format: Article
Language:English
Published: 2013
Online Access:http://psasir.upm.edu.my/id/eprint/28743/1/Theoretical%20formulation%20to%20evaluate%20capacitance%20for%20before%20and%20after%20touch%20point%20MEMS%20capacitive%20pressure%20sensors.pdf
http://psasir.upm.edu.my/id/eprint/28743/
http://www.theijes.com/papers/v2-i1/AT02102780286.pdf
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spelling my.upm.eprints.287432015-12-07T07:59:44Z http://psasir.upm.edu.my/id/eprint/28743/ Theoretical formulation to evaluate capacitance for before and after touch point MEMS capacitive pressure sensors Hezarjaribi, Yadollah Hamidon, Mohd Nizar Micro-electromechanical systems (MEMS) have received a great deal of attention in recent years. This is due to the great promise of increased miniaturization and Performance of MEMS devices over conventional devices. MEMS pressure sensors currently dominate the market for greater than atmospheric pressure sensors. In this paper, a theoretical and finite elements analysis (FEA) solution for Micro-electromechanical systems (MEMS) pressure sensor to evaluate capacitance for before and after touch point is proposed. By looking at MEMS devices, when the diaphragm starts touching the fixed electrode by applying loads, it will have a major effect on the overall of the capacitance. Therefore, one should consider the effect of touch mode capacitance value in the system to evaluate good linearity, large operating pressure range and large overload protection at output. As of so far the evaluation for capacitance value of touch point and after touch point has not been evaluated in the literatures. This paper presents the new analytical formula to approach for including the touch-down effect capacitance value of Microsystems. The proposed MEMS capacitive pressure sensor demonstrated diaphragm with radius of , the gap depth of and the sensor exhibit linear response with pressure from 0.01 Mpa to 1.7 Mpa. 2013 Article PeerReviewed application/pdf en http://psasir.upm.edu.my/id/eprint/28743/1/Theoretical%20formulation%20to%20evaluate%20capacitance%20for%20before%20and%20after%20touch%20point%20MEMS%20capacitive%20pressure%20sensors.pdf Hezarjaribi, Yadollah and Hamidon, Mohd Nizar (2013) Theoretical formulation to evaluate capacitance for before and after touch point MEMS capacitive pressure sensors. The International Journal of Engineering and Science, 2 (1). pp. 278-286. ISSN 2319–1805; ESSN: 2319-1813 http://www.theijes.com/papers/v2-i1/AT02102780286.pdf
institution Universiti Putra Malaysia
building UPM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Putra Malaysia
content_source UPM Institutional Repository
url_provider http://psasir.upm.edu.my/
language English
description Micro-electromechanical systems (MEMS) have received a great deal of attention in recent years. This is due to the great promise of increased miniaturization and Performance of MEMS devices over conventional devices. MEMS pressure sensors currently dominate the market for greater than atmospheric pressure sensors. In this paper, a theoretical and finite elements analysis (FEA) solution for Micro-electromechanical systems (MEMS) pressure sensor to evaluate capacitance for before and after touch point is proposed. By looking at MEMS devices, when the diaphragm starts touching the fixed electrode by applying loads, it will have a major effect on the overall of the capacitance. Therefore, one should consider the effect of touch mode capacitance value in the system to evaluate good linearity, large operating pressure range and large overload protection at output. As of so far the evaluation for capacitance value of touch point and after touch point has not been evaluated in the literatures. This paper presents the new analytical formula to approach for including the touch-down effect capacitance value of Microsystems. The proposed MEMS capacitive pressure sensor demonstrated diaphragm with radius of , the gap depth of and the sensor exhibit linear response with pressure from 0.01 Mpa to 1.7 Mpa.
format Article
author Hezarjaribi, Yadollah
Hamidon, Mohd Nizar
spellingShingle Hezarjaribi, Yadollah
Hamidon, Mohd Nizar
Theoretical formulation to evaluate capacitance for before and after touch point MEMS capacitive pressure sensors
author_facet Hezarjaribi, Yadollah
Hamidon, Mohd Nizar
author_sort Hezarjaribi, Yadollah
title Theoretical formulation to evaluate capacitance for before and after touch point MEMS capacitive pressure sensors
title_short Theoretical formulation to evaluate capacitance for before and after touch point MEMS capacitive pressure sensors
title_full Theoretical formulation to evaluate capacitance for before and after touch point MEMS capacitive pressure sensors
title_fullStr Theoretical formulation to evaluate capacitance for before and after touch point MEMS capacitive pressure sensors
title_full_unstemmed Theoretical formulation to evaluate capacitance for before and after touch point MEMS capacitive pressure sensors
title_sort theoretical formulation to evaluate capacitance for before and after touch point mems capacitive pressure sensors
publishDate 2013
url http://psasir.upm.edu.my/id/eprint/28743/1/Theoretical%20formulation%20to%20evaluate%20capacitance%20for%20before%20and%20after%20touch%20point%20MEMS%20capacitive%20pressure%20sensors.pdf
http://psasir.upm.edu.my/id/eprint/28743/
http://www.theijes.com/papers/v2-i1/AT02102780286.pdf
_version_ 1643829555314556928
score 13.211869

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