Cover Image

The effect of titanium nitride thickness as a support layer for carbon nanotubes growth

The effect of titanium nitride (TiN) thickness as the support layer for carbon nanotubes (CNTs) growth was investigated by depositing three different thicknesses: 20 nm, 50 nm and 100 nm. This TiN support layer was deposited on SiO2 pads before depositing nickel (Ni) as the catalyst material. The Ni...

Full description

Saved in:
Bibliographic Details
Main Authors: Ramli, Muhammad M., Osman, N. H., Darminto, D., Abdullah, M. M. A. B.
Format: Article
Published: Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences 2022
Online Access:http://psasir.upm.edu.my/id/eprint/103525/
https://journals.pan.pl/dlibra/show-content?id=124023
Tags: Add Tag
No Tags, Be the first to tag this record!
id my.upm.eprints.103525
record_format eprints
spelling my.upm.eprints.1035252023-05-23T01:29:31Z http://psasir.upm.edu.my/id/eprint/103525/ The effect of titanium nitride thickness as a support layer for carbon nanotubes growth Ramli, Muhammad M. Osman, N. H. Darminto, D. Abdullah, M. M. A. B. The effect of titanium nitride (TiN) thickness as the support layer for carbon nanotubes (CNTs) growth was investigated by depositing three different thicknesses: 20 nm, 50 nm and 100 nm. This TiN support layer was deposited on SiO2 pads before depositing nickel (Ni) as the catalyst material. The Ni distribution on different TiN thicknesses was studied under hydrogen environment at 600°C. Then, the samples were further annealed at 600°C in acetylene and hydrogen environment for CNTs growth. The results show that, the optimum TiN thickness was obtained for 50 nm attributed by the lowest D to G ratio (0.8). Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences 2022 Article PeerReviewed Ramli, Muhammad M. and Osman, N. H. and Darminto, D. and Abdullah, M. M. A. B. (2022) The effect of titanium nitride thickness as a support layer for carbon nanotubes growth. Archives of Metallurgy and Materials, 67 (3). 963 - 966. ISSN 1733-3490 https://journals.pan.pl/dlibra/show-content?id=124023 10.24425/amm.2022.139689
institution Universiti Putra Malaysia
building UPM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Putra Malaysia
content_source UPM Institutional Repository
url_provider http://psasir.upm.edu.my/
description The effect of titanium nitride (TiN) thickness as the support layer for carbon nanotubes (CNTs) growth was investigated by depositing three different thicknesses: 20 nm, 50 nm and 100 nm. This TiN support layer was deposited on SiO2 pads before depositing nickel (Ni) as the catalyst material. The Ni distribution on different TiN thicknesses was studied under hydrogen environment at 600°C. Then, the samples were further annealed at 600°C in acetylene and hydrogen environment for CNTs growth. The results show that, the optimum TiN thickness was obtained for 50 nm attributed by the lowest D to G ratio (0.8).
format Article
author Ramli, Muhammad M.
Osman, N. H.
Darminto, D.
Abdullah, M. M. A. B.
spellingShingle Ramli, Muhammad M.
Osman, N. H.
Darminto, D.
Abdullah, M. M. A. B.
The effect of titanium nitride thickness as a support layer for carbon nanotubes growth
author_facet Ramli, Muhammad M.
Osman, N. H.
Darminto, D.
Abdullah, M. M. A. B.
author_sort Ramli, Muhammad M.
title The effect of titanium nitride thickness as a support layer for carbon nanotubes growth
title_short The effect of titanium nitride thickness as a support layer for carbon nanotubes growth
title_full The effect of titanium nitride thickness as a support layer for carbon nanotubes growth
title_fullStr The effect of titanium nitride thickness as a support layer for carbon nanotubes growth
title_full_unstemmed The effect of titanium nitride thickness as a support layer for carbon nanotubes growth
title_sort effect of titanium nitride thickness as a support layer for carbon nanotubes growth
publisher Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences
publishDate 2022
url http://psasir.upm.edu.my/id/eprint/103525/
https://journals.pan.pl/dlibra/show-content?id=124023
_version_ 1768009467083882496
score 13.223943

Similar Items