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The surface characteristics of under bump metallurgy (UBM) in electroless nickel immersion gold (ENIG) deposition

This paper discusses on the surface characteristics of each of the seven set-up process steps prior completion of under bump metallurgy (UBM) deposition. The Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM) techniques were used to obtain the surface roughness and morphology of ea...

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Main Authors: Arshad, M.K.M., Ahmad, I., Jalar, A., Omar, G.
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Published: 2017
Online Access:http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5320
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spelling my.uniten.dspace-53202017-11-15T02:57:31Z The surface characteristics of under bump metallurgy (UBM) in electroless nickel immersion gold (ENIG) deposition Arshad, M.K.M. Ahmad, I. Jalar, A. Omar, G. This paper discusses on the surface characteristics of each of the seven set-up process steps prior completion of under bump metallurgy (UBM) deposition. The Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM) techniques were used to obtain the surface roughness and morphology of each deposition process. The elemental analysis using Energy Disperse X-Ray (EDX) and precision micro-cross-section using Focus Ion Beam (FIB) was also used in this study. The first zincation process has high surface roughness but preserved surface morphology of initial thin-film surface. The second zincation provides the improved surface roughness due to the replacement aluminum layer with ion zinc in the solution. Smooth surfaces leads to better shear strength. However, second zincation will affect the Al thickness, hence excessive attacks on Al layer may cause reliability problem. © 2005 Elsevier Ltd. All rights reserved. 2017-11-15T02:57:31Z 2017-11-15T02:57:31Z 2006 http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5320
institution Universiti Tenaga Nasional
building UNITEN Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Tenaga Nasional
content_source UNITEN Institutional Repository
url_provider http://dspace.uniten.edu.my/
description This paper discusses on the surface characteristics of each of the seven set-up process steps prior completion of under bump metallurgy (UBM) deposition. The Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM) techniques were used to obtain the surface roughness and morphology of each deposition process. The elemental analysis using Energy Disperse X-Ray (EDX) and precision micro-cross-section using Focus Ion Beam (FIB) was also used in this study. The first zincation process has high surface roughness but preserved surface morphology of initial thin-film surface. The second zincation provides the improved surface roughness due to the replacement aluminum layer with ion zinc in the solution. Smooth surfaces leads to better shear strength. However, second zincation will affect the Al thickness, hence excessive attacks on Al layer may cause reliability problem. © 2005 Elsevier Ltd. All rights reserved.
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author Arshad, M.K.M.
Ahmad, I.
Jalar, A.
Omar, G.
spellingShingle Arshad, M.K.M.
Ahmad, I.
Jalar, A.
Omar, G.
The surface characteristics of under bump metallurgy (UBM) in electroless nickel immersion gold (ENIG) deposition
author_facet Arshad, M.K.M.
Ahmad, I.
Jalar, A.
Omar, G.
author_sort Arshad, M.K.M.
title The surface characteristics of under bump metallurgy (UBM) in electroless nickel immersion gold (ENIG) deposition
title_short The surface characteristics of under bump metallurgy (UBM) in electroless nickel immersion gold (ENIG) deposition
title_full The surface characteristics of under bump metallurgy (UBM) in electroless nickel immersion gold (ENIG) deposition
title_fullStr The surface characteristics of under bump metallurgy (UBM) in electroless nickel immersion gold (ENIG) deposition
title_full_unstemmed The surface characteristics of under bump metallurgy (UBM) in electroless nickel immersion gold (ENIG) deposition
title_sort surface characteristics of under bump metallurgy (ubm) in electroless nickel immersion gold (enig) deposition
publishDate 2017
url http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5320
_version_ 1644493656564957184
score 13.222552

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