Comments: Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters

Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters

Thin film piezoelectric materials play an essential role in micro electro mechanical system (MEMS) energy harvesting due to its low power requirement and high available energy densities. Non-ferroelectric piezoelectric materials such as ZnO and AlN are highly silicon compatible making it suitable fo...

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Bibliographic Details
Main Authors:	Md Ralib A.A., Nordin A.N., Salleh H., Othman R.
Other Authors:	36537608500
Format:	Conference paper
Published:	2023
Subjects:	Aluminum Chemical bonds Design Electric properties Energy harvesting Fabrication Field emission microscopes Finite element method Magnetron sputtering MEMS Natural frequencies Piezoelectric materials Sensor nodes Silicon Thin films Vapor deposition X ray diffraction Zinc oxide AlN Available energy density Chemical batteries CMOS Compatible Deposition methods Electronic functionality Energy Harvester Field emission scanning electron microscopy Finite element modeling Low Power Low power wireless Material characterizations Open-circuit output voltages Output voltages Piezoelectric couplings Piezoelectric MEMS Piezoelectric thin films Power sources Resonance frequencies rf-Magnetron sputtering Self-powered Silicon substrates Thin film piezoelectric Transversal modes ZnO Piezoelectricity
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Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters

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