Development of the super-heterodyne microwave interferometer and langmuir probe system for plasma diagnostics
Low temperature plasma or process plasma is widely used in various types of material processing such as surface modification, etching and coating.
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2023
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my.uniten.dspace-207282023-05-05T11:32:05Z Development of the super-heterodyne microwave interferometer and langmuir probe system for plasma diagnostics Yee Yue Fei Low temperature plasma or process plasma is widely used in various types of material processing such as surface modification, etching and coating. 1 92 2023-05-03T15:16:35Z 2023-05-03T15:16:35Z 2006 Resource Types::text::Final Year Project https://irepository.uniten.edu.my/handle/123456789/20728 en application/pdf |
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Universiti Tenaga Nasional |
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Asia |
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Malaysia |
| content_provider |
Universiti Tenaga Nasional |
| content_source |
UNITEN Institutional Repository |
| url_provider |
http://dspace.uniten.edu.my/ |
| language |
English |
| description |
Low temperature plasma or process plasma is widely used in various types of material processing such as surface modification, etching and coating. |
| format |
Resource Types::text::Final Year Project |
| author |
Yee Yue Fei |
| spellingShingle |
Yee Yue Fei Development of the super-heterodyne microwave interferometer and langmuir probe system for plasma diagnostics |
| author_facet |
Yee Yue Fei |
| author_sort |
Yee Yue Fei |
| title |
Development of the super-heterodyne microwave interferometer and langmuir probe system for plasma diagnostics |
| title_short |
Development of the super-heterodyne microwave interferometer and langmuir probe system for plasma diagnostics |
| title_full |
Development of the super-heterodyne microwave interferometer and langmuir probe system for plasma diagnostics |
| title_fullStr |
Development of the super-heterodyne microwave interferometer and langmuir probe system for plasma diagnostics |
| title_full_unstemmed |
Development of the super-heterodyne microwave interferometer and langmuir probe system for plasma diagnostics |
| title_sort |
development of the super-heterodyne microwave interferometer and langmuir probe system for plasma diagnostics |
| publishDate |
2023 |
| _version_ |
1806428097497530368 |
| score |
13.211869 |