Electromagnetic modelling of rf mems structures
Radio Frequency Micro - Electro - Mechanical System (RF MEMS) is one of the emerging applications in MEMS technology which are used in phase - shifters, couplers, filters, tunes or antennas. In order to model and optimize the performance of the devices, an accurate k...
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| Main Author: | |
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| Format: | Final Year Project Report |
| Language: | English |
| Published: |
Universiti Malaysia Sarawak, UNIMAS
2009
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| Subjects: | |
| Online Access: | http://ir.unimas.my/id/eprint/6513/1/Edward%20David%20Miieg%20ft.pdf http://ir.unimas.my/id/eprint/6513/ |
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| Summary: | Radio Frequency Micro
-
Electro
-
Mechanical System
(RF MEMS) is one of the
emerging applications in MEMS technology which are used in phase
-
shifters,
couplers, filters, tunes or antennas. In order to model and optimize the performance
of the devices, an accurate knowledge and understanding of the electrom
agnetic field
such as the Maxwell theorem is essential.
In this project, a new numerical method is introduced to analyze the problems
which cause the limitation of the conventional time domain technique. The method is
expanded to analyze MEMS devi
ces with moving parts with the Finite Different
Time Domain (FDTD) method for Electromagnetic (EM) field. By employing
transformation in the time factor, the grid generation technique can be applied to the
time
-
domain analysis of a moving object. These tec
hniques are implemented in
analyzing structure of uninformed shape and motion.
The s
imulation method for the RF MEMS variable capacitor is applied to the
analysis of a two
-
dimensional (2D) Transverse Electric (TE) mode. The acceleration
of the p
lates is derived from the equilibrium between the spring force and the
electrical force. A damping constant is added into the system and the motion of the
MEMS variab
le capacitor is analyzed. The s
imulation will analyze the damping
effect towards the motio
n due to the damping mechanism such as fluids damping and
electronics damping. |
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