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Finite element (quasi-static) model of electrostatic microelectromechanical cantilever

A finite element model has been developed to enable an initial assessment of the analysis of an elastic-electrostatic system of an electrostatic micromechanical cantilever (which is often referred to simply as a cantilever) for microelectromechanical systems (MEMS) design performance and evaluation....

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Main Author: Lai, Adriana Mook Kim
Format: Thesis
Language:English
Published: Universiti Malaysia Sarawak, UNIMAS 2009
Subjects:
TA Engineering (General). Civil engineering (General)
Online Access:http://ir.unimas.my/id/eprint/232/9/Finite%20element%20%28quasi-static%29%20model%20of%20electrostatic%20microelectromechanical%20cantilever%20%28fulltext%29.pdf
http://ir.unimas.my/id/eprint/232/
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spelling my.unimas.ir.2322023-03-06T09:28:30Z http://ir.unimas.my/id/eprint/232/ Finite element (quasi-static) model of electrostatic microelectromechanical cantilever Lai, Adriana Mook Kim TA Engineering (General). Civil engineering (General) A finite element model has been developed to enable an initial assessment of the analysis of an elastic-electrostatic system of an electrostatic micromechanical cantilever (which is often referred to simply as a cantilever) for microelectromechanical systems (MEMS) design performance and evaluation. The model comprised of an electrostatic and a mechanical solver. The electrostatic solver derived the electrostatic force on the cantilever from the potential difference applied between the cantilever and a fixed reference plate. The force is then fed to the mechanical solver that computed the deformation of the cantilever. Solutions to the solvers were attained interatively. It was assumed that the system was in quasi-static equilibrium for each interative step, as the time taken for redistribution of electric charges on the surface of the cantilever was much shorter in comparison of the mechanical reaction time of the cantilever. Universiti Malaysia Sarawak, UNIMAS 2009 Thesis NonPeerReviewed text en http://ir.unimas.my/id/eprint/232/9/Finite%20element%20%28quasi-static%29%20model%20of%20electrostatic%20microelectromechanical%20cantilever%20%28fulltext%29.pdf Lai, Adriana Mook Kim (2009) Finite element (quasi-static) model of electrostatic microelectromechanical cantilever. Masters thesis, Universiti Malaysia Sarawak (UNIMAS).
institution Universiti Malaysia Sarawak
building Centre for Academic Information Services (CAIS)
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Sarawak
content_source UNIMAS Institutional Repository
url_provider http://ir.unimas.my/
language English
topic TA Engineering (General). Civil engineering (General)
spellingShingle TA Engineering (General). Civil engineering (General)
Lai, Adriana Mook Kim
Finite element (quasi-static) model of electrostatic microelectromechanical cantilever
description A finite element model has been developed to enable an initial assessment of the analysis of an elastic-electrostatic system of an electrostatic micromechanical cantilever (which is often referred to simply as a cantilever) for microelectromechanical systems (MEMS) design performance and evaluation. The model comprised of an electrostatic and a mechanical solver. The electrostatic solver derived the electrostatic force on the cantilever from the potential difference applied between the cantilever and a fixed reference plate. The force is then fed to the mechanical solver that computed the deformation of the cantilever. Solutions to the solvers were attained interatively. It was assumed that the system was in quasi-static equilibrium for each interative step, as the time taken for redistribution of electric charges on the surface of the cantilever was much shorter in comparison of the mechanical reaction time of the cantilever.
format Thesis
author Lai, Adriana Mook Kim
author_facet Lai, Adriana Mook Kim
author_sort Lai, Adriana Mook Kim
title Finite element (quasi-static) model of electrostatic microelectromechanical cantilever
title_short Finite element (quasi-static) model of electrostatic microelectromechanical cantilever
title_full Finite element (quasi-static) model of electrostatic microelectromechanical cantilever
title_fullStr Finite element (quasi-static) model of electrostatic microelectromechanical cantilever
title_full_unstemmed Finite element (quasi-static) model of electrostatic microelectromechanical cantilever
title_sort finite element (quasi-static) model of electrostatic microelectromechanical cantilever
publisher Universiti Malaysia Sarawak, UNIMAS
publishDate 2009
url http://ir.unimas.my/id/eprint/232/9/Finite%20element%20%28quasi-static%29%20model%20of%20electrostatic%20microelectromechanical%20cantilever%20%28fulltext%29.pdf
http://ir.unimas.my/id/eprint/232/
_version_ 1759693293539557376
score 13.211869

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