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A very high Q-factor inductor using MEMS technology

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Main Authors:	Khalid, N., Shah, K., Singh, J., Le, H. P., Devlin, J., Zaliman, Sauli, Lt. Assoc. Prof.
Format:	Working Paper
Language:	English
Published:	SPIE 2010
Subjects:	High Quality (Q) factor high radio frequency (RF) Inductor Micro-electro-mechanical System (MEMS) Q-factor
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/8426
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id	my.unimap-8426
record_format	dspace
spelling	my.unimap-84262010-08-02T05:00:10Z A very high Q-factor inductor using MEMS technology Khalid, N. Shah, K. Singh, J. Le, H. P. Devlin, J. Zaliman, Sauli, Lt. Assoc. Prof. High Quality (Q) factor high radio frequency (RF) Inductor Micro-electro-mechanical System (MEMS) Q-factor Link to publisher's homepage at http://spiedigitallibrary.aip.org/ 2010-08-02T05:00:10Z 2010-08-02T05:00:10Z 2010-03-30 Working Paper Proceeding of SPIE, vol. 7646 (1), 2010, p.76461I 978-081948061-3 0277-786X http://dx.doi.org/10.1117/12.848686 http://hdl.handle.net/123456789/8426 en Proceedings of the Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2010 SPIE
institution	Universiti Malaysia Perlis
building	UniMAP Library
collection	Institutional Repository
continent	Asia
country	Malaysia
content_provider	Universiti Malaysia Perlis
content_source	UniMAP Library Digital Repository
url_provider	http://dspace.unimap.edu.my/
language	English
topic	High Quality (Q) factor high radio frequency (RF) Inductor Micro-electro-mechanical System (MEMS) Q-factor
spellingShingle	High Quality (Q) factor high radio frequency (RF) Inductor Micro-electro-mechanical System (MEMS) Q-factor Khalid, N. Shah, K. Singh, J. Le, H. P. Devlin, J. Zaliman, Sauli, Lt. Assoc. Prof. A very high Q-factor inductor using MEMS technology
description	Link to publisher's homepage at http://spiedigitallibrary.aip.org/
format	Working Paper
author	Khalid, N. Shah, K. Singh, J. Le, H. P. Devlin, J. Zaliman, Sauli, Lt. Assoc. Prof.
author_facet	Khalid, N. Shah, K. Singh, J. Le, H. P. Devlin, J. Zaliman, Sauli, Lt. Assoc. Prof.
author_sort	Khalid, N.
title	A very high Q-factor inductor using MEMS technology
title_short	A very high Q-factor inductor using MEMS technology
title_full	A very high Q-factor inductor using MEMS technology
title_fullStr	A very high Q-factor inductor using MEMS technology
title_full_unstemmed	A very high Q-factor inductor using MEMS technology
title_sort	very high q-factor inductor using mems technology
publisher	SPIE
publishDate	2010
url	http://dspace.unimap.edu.my/xmlui/handle/123456789/8426
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score	13.222552

A very high Q-factor inductor using MEMS technology

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