Fabrication of carbon nanotube field-effect transistor using shadow mask technique
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Universiti Malaysia Perlis (UniMAP)
2022
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my.unimap-763702022-10-07T02:40:02Z Fabrication of carbon nanotube field-effect transistor using shadow mask technique Navneet, Gupta Ankita, Dixit Suraj, Baloda ngupta@pilani.bits-pilani.ac.in Department of Electrical and Electronics Engineering, Birla Institute of Technology and Science, Pilani Rajasthan, India CNT Interdigitated electrode Multichannel Carbon Nanotube Field Effect Transistor Shadow Mask Technique Link to publisher's homepage at http://ijneam.unimap.edu.my In this work, a new approach based on shadow mask has been reported for fabricating low-cost carbon nanotube field-effect transistor (CNFET) with interdigitated source and drain electrodes. The drop cast method is used for depositing CNTs, which was characterized using Field Emission Scanning Electron Microscope (FESEM) and RAMAN spectroscopy. The RAMAN spectroscopy confirms the deposition of CNT and SEM images demonstrated the deposition of CNT network on dielectric layer without using O2 plasma etching. Further, Keithley 4200 SCS parameter analyzer was used to perform the electrical characterization of the fabricated device. The results indicated that the fabricated CNFET follow the trend of p-type multichannel CNFET. 2022-10-07T02:40:02Z 2022-10-07T02:40:02Z 2022-07 Article International Journal of Nanoelectronics and Materials, vol.15(3), 2022, pages 189-196 1985-5761 (Printed) 2232-1535 (online) http://dspace.unimap.edu.my:80/xmlui/handle/123456789/76370 en Universiti Malaysia Perlis (UniMAP) |
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CNT Interdigitated electrode Multichannel Carbon Nanotube Field Effect Transistor Shadow Mask Technique |
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CNT Interdigitated electrode Multichannel Carbon Nanotube Field Effect Transistor Shadow Mask Technique Navneet, Gupta Ankita, Dixit Suraj, Baloda Fabrication of carbon nanotube field-effect transistor using shadow mask technique |
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Link to publisher's homepage at http://ijneam.unimap.edu.my |
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ngupta@pilani.bits-pilani.ac.in |
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ngupta@pilani.bits-pilani.ac.in Navneet, Gupta Ankita, Dixit Suraj, Baloda |
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Article |
author |
Navneet, Gupta Ankita, Dixit Suraj, Baloda |
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Navneet, Gupta |
title |
Fabrication of carbon nanotube field-effect transistor using shadow mask technique |
title_short |
Fabrication of carbon nanotube field-effect transistor using shadow mask technique |
title_full |
Fabrication of carbon nanotube field-effect transistor using shadow mask technique |
title_fullStr |
Fabrication of carbon nanotube field-effect transistor using shadow mask technique |
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Fabrication of carbon nanotube field-effect transistor using shadow mask technique |
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fabrication of carbon nanotube field-effect transistor using shadow mask technique |
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Universiti Malaysia Perlis (UniMAP) |
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2022 |
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http://dspace.unimap.edu.my:80/xmlui/handle/123456789/76370 |
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1751537918148608000 |
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13.222552 |