Cover Image

Mask design and fabrication of LiSFET for light sensor application

Link to publisher's homepage at http://ieeexplore.ieee.org

Saved in:
Bibliographic Details
Main Authors: Uda, Hashim, Kasim, Abdul Rahman, Amir Razif Arief, Jamil Abdullah
Other Authors: uda@unimap.edu.my
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineering (IEEE) 2009
Subjects:
Amplifiers
Field effect transistor switches
Photolithography
Nonelectric sensing devices
Integrated circuit fabrication
Light sensor MOSFET
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/7366
Tags: Add Tag
No Tags, Be the first to tag this record!
id my.unimap-7366
record_format dspace
spelling my.unimap-73662014-09-02T07:49:36Z Mask design and fabrication of LiSFET for light sensor application Uda, Hashim Kasim, Abdul Rahman Amir Razif Arief, Jamil Abdullah uda@unimap.edu.my Amplifiers Field effect transistor switches Photolithography Nonelectric sensing devices Integrated circuit fabrication Light sensor MOSFET Link to publisher's homepage at http://ieeexplore.ieee.org The usage of MOSFET is not limited as amplifier and switch only but it has great potential to become the sensors when sensing mediums which integrated on to MOSFET. This research is intended to study the combination of MOSFET and photoconductive material to perform as a single device Light Sensor MOSFET (LiSFET) using standard lithography process. Photolithography (also called optical lithography) has long been used to transfer circuit patterns from a template called photomask (or simply mask) on to silicon wafers during integrated circuit (IC) fabrication. When a light source is used to project the mask image onto the wafer, the image quality is often affected by the performance of the imaging system (also called exposure system). 2009-12-06T01:15:09Z 2009-12-06T01:15:09Z 2008-12-01 Article p.1-5 978-1-4244-2315-6 http://ieeexplore.ieee.org/search/wrapper.jsp?arnumber=4786651 http://hdl.handle.net/123456789/7366 en Proceedings of the International Conference on Electronic Design (ICED 2008) Institute of Electrical and Electronics Engineering (IEEE)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Amplifiers
Field effect transistor switches
Photolithography
Nonelectric sensing devices
Integrated circuit fabrication
Light sensor MOSFET
spellingShingle Amplifiers
Field effect transistor switches
Photolithography
Nonelectric sensing devices
Integrated circuit fabrication
Light sensor MOSFET
Uda, Hashim
Kasim, Abdul Rahman
Amir Razif Arief, Jamil Abdullah
Mask design and fabrication of LiSFET for light sensor application
description Link to publisher's homepage at http://ieeexplore.ieee.org
author2 uda@unimap.edu.my
author_facet uda@unimap.edu.my
Uda, Hashim
Kasim, Abdul Rahman
Amir Razif Arief, Jamil Abdullah
format Article
author Uda, Hashim
Kasim, Abdul Rahman
Amir Razif Arief, Jamil Abdullah
author_sort Uda, Hashim
title Mask design and fabrication of LiSFET for light sensor application
title_short Mask design and fabrication of LiSFET for light sensor application
title_full Mask design and fabrication of LiSFET for light sensor application
title_fullStr Mask design and fabrication of LiSFET for light sensor application
title_full_unstemmed Mask design and fabrication of LiSFET for light sensor application
title_sort mask design and fabrication of lisfet for light sensor application
publisher Institute of Electrical and Electronics Engineering (IEEE)
publishDate 2009
url http://dspace.unimap.edu.my/xmlui/handle/123456789/7366
_version_ 1643788795052556288
score 13.211869

Similar Items