Effect of discharge power on the properties of GaN thin films on AlN-(002) prepared by magnetron sputtering deposition
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Main Authors: | Muliana, Tahan, Nafarizal, Nayan, Siti Noraiza, Abd Razak, Anis Suhaili, Bakri, Zulkifli, Azman, Mohd Zainizan, Sahdan, Nur Amaliyana, Rahip, Ahmad Shuhaimi, Abu Bakar, Mohd Yazid, Ahmad |
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Other Authors: | nafa@uthm.edu.my |
Format: | Article |
Language: | English |
Published: |
Universiti Malaysia Perlis (UniMAP)
2020
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Subjects: | |
Online Access: | http://dspace.unimap.edu.my:80/xmlui/handle/123456789/67712 |
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