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Design and fabrication of Microfluidic devices: MOSFET & Capacitor

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Main Authors: Osman, R. A., Esa, S. R., Prabakaran, Poopalan
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineers (IEEE) 2009
Subjects:
Microfluidics
Capacitors
Microfluidic capacitor
Metal oxide semiconductors
Liquid Capacitor (LCap)
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/6656
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spelling my.unimap-66562010-11-23T05:09:27Z Design and fabrication of Microfluidic devices: MOSFET & Capacitor Osman, R. A. Esa, S. R. Prabakaran, Poopalan Microfluidics Capacitors Microfluidic capacitor Metal oxide semiconductors Liquid Capacitor (LCap) Link to publisher's homepage at http://ieeexplore.ieee.org Microfluidic devices, based on silicon, are fabricated by photolithography, wet chemical etching with focus on an liquid conduction channel n-channel depletion MOSFET and a silica-liquid dielectric capacitor. Masks for both devices were designed with AutoCAD and printed on transparencies. Fabrication on p-〈100〉 4" Si wafers were executed and the devices were marginally characterized due to complications. The gate channel for the Liquid FET (LFET) were set to four sizes, which are 250,um, 500im, 750μm and 1000μm. The Liquid Capacitor (LCap) size was limited to only two, for lack of space on the wafer. A variety of processes were used to fabricate these devices. Tests show feasibility of the idea but proves process and process parameter control is extremely important and critical. 2009-08-02T01:49:16Z 2009-08-02T01:49:16Z 2006 Article p.321-327 1089-8190 http://ieeexplore.ieee.org/xpls/abs_all.jsp?=&arnumber=4456474 http://hdl.handle.net/123456789/6656 en Proceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Symposium, 2006 Institute of Electrical and Electronics Engineers (IEEE)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Microfluidics
Capacitors
Microfluidic capacitor
Metal oxide semiconductors
Liquid Capacitor (LCap)
spellingShingle Microfluidics
Capacitors
Microfluidic capacitor
Metal oxide semiconductors
Liquid Capacitor (LCap)
Osman, R. A.
Esa, S. R.
Prabakaran, Poopalan
Design and fabrication of Microfluidic devices: MOSFET & Capacitor
description Link to publisher's homepage at http://ieeexplore.ieee.org
format Article
author Osman, R. A.
Esa, S. R.
Prabakaran, Poopalan
author_facet Osman, R. A.
Esa, S. R.
Prabakaran, Poopalan
author_sort Osman, R. A.
title Design and fabrication of Microfluidic devices: MOSFET & Capacitor
title_short Design and fabrication of Microfluidic devices: MOSFET & Capacitor
title_full Design and fabrication of Microfluidic devices: MOSFET & Capacitor
title_fullStr Design and fabrication of Microfluidic devices: MOSFET & Capacitor
title_full_unstemmed Design and fabrication of Microfluidic devices: MOSFET & Capacitor
title_sort design and fabrication of microfluidic devices: mosfet & capacitor
publisher Institute of Electrical and Electronics Engineers (IEEE)
publishDate 2009
url http://dspace.unimap.edu.my/xmlui/handle/123456789/6656
_version_ 1643788594657099776
score 13.222552

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