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The Influence of Nitrogen Pressure on the Structure of a-CNx Thin Films Prepared by PLD Method

Link to publisher's homepage at http://ijneam.unimap.edu.my

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Bibliographic Details
Main Author: Kamal, Kayed
Other Authors: khmk2000@gmail.com
Format: Article
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2019
Subjects:
XPS Spectroscopy
Carbon Nitride
Raman Spectroscopy
Laser
Deposition
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/58783
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spelling my.unimap-587832019-03-06T09:54:07Z The Influence of Nitrogen Pressure on the Structure of a-CNx Thin Films Prepared by PLD Method Kamal, Kayed khmk2000@gmail.com XPS Spectroscopy Carbon Nitride Raman Spectroscopy Laser Deposition Link to publisher's homepage at http://ijneam.unimap.edu.my The structure of amorphous CNX thin films have a variety of chemical bond, and studies on these bonds ratios is very important because these ratios determine the appropriate technical use of these films. Therefore, this paper aim to investigate the relation between the conditions of preparation (deposition pressure) of a-CNx thin films prepared using PLD (Pulsed Laser Deposition) method and the film's structure. Results shown that the deposition pressure variation does not affecting the concentration in the same manner for all bonds in the film. Moreover, the sp2 cluster size and the order degree are related to the numerical value of the deposition pressure. 2019-03-06T09:54:07Z 2019-03-06T09:54:07Z 2019-01 Article International Journal of Nanoelectronics and Materials, vol.12(1), 2019, pages 19-24 1985-5761 (Printed) 1997-4434 (Online) http://dspace.unimap.edu.my:80/xmlui/handle/123456789/58783 en Universiti Malaysia Perlis (UniMAP)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic XPS Spectroscopy
Carbon Nitride
Raman Spectroscopy
Laser
Deposition
spellingShingle XPS Spectroscopy
Carbon Nitride
Raman Spectroscopy
Laser
Deposition
Kamal, Kayed
The Influence of Nitrogen Pressure on the Structure of a-CNx Thin Films Prepared by PLD Method
description Link to publisher's homepage at http://ijneam.unimap.edu.my
author2 khmk2000@gmail.com
author_facet khmk2000@gmail.com
Kamal, Kayed
format Article
author Kamal, Kayed
author_sort Kamal, Kayed
title The Influence of Nitrogen Pressure on the Structure of a-CNx Thin Films Prepared by PLD Method
title_short The Influence of Nitrogen Pressure on the Structure of a-CNx Thin Films Prepared by PLD Method
title_full The Influence of Nitrogen Pressure on the Structure of a-CNx Thin Films Prepared by PLD Method
title_fullStr The Influence of Nitrogen Pressure on the Structure of a-CNx Thin Films Prepared by PLD Method
title_full_unstemmed The Influence of Nitrogen Pressure on the Structure of a-CNx Thin Films Prepared by PLD Method
title_sort influence of nitrogen pressure on the structure of a-cnx thin films prepared by pld method
publisher Universiti Malaysia Perlis (UniMAP)
publishDate 2019
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/58783
_version_ 1643806006466052096
score 13.222552

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