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Response surface methodology (RSM) in fabrication of nanostructured silicon

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Main Authors: Ayu Wazira, Azhari, Kamaruzzaman, Sopian, Dewi Suriyani, Che Halin, Abdul Haqi, Ibrahim, Saleem Hussain, Zaidi
Other Authors: abdulhaqi@unimap.edu.my
Format: Article
Language:English
Published: Trans Tech Publications Ltd 2016
Subjects:
Box-behnken design
DoE
MACE
RSM
Si nanostructures
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41461
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spelling my.unimap-414612016-05-04T08:18:07Z Response surface methodology (RSM) in fabrication of nanostructured silicon Ayu Wazira, Azhari Kamaruzzaman, Sopian Dewi Suriyani, Che Halin Abdul Haqi, Ibrahim Saleem Hussain, Zaidi abdulhaqi@unimap.edu.my Box-behnken design DoE MACE RSM Si nanostructures Link to publisher's homepage at http://www.ttp.net/ In this paper, a respond surface methodology (RSM) model has been developed using three levels Box-Benkhen experimental design (BBD) technique to study the influence of several metal-assisted chemical etching (MACE) process variables on the properties of nanostructured silicon (Si) wafer. Five process variables are examined i.e. concentrations of silver (Ag), hydrofluoric acid (HF), deposition time, H2O2concentration and etching time as a function of etching rate. Design-Expert®software (version 7.1) is used in formulating the RSM model of five factors with 46 experiments. A regression quadratic model is developed to correlate the process variables where the most significant factors are identified and validated using analysis of variance (ANOVA). The model for etching rate is found to be significant with R2of 0.8, where both Ag concentrations and etching time are the major influence. 2016-05-04T08:18:07Z 2016-05-04T08:18:07Z 2016 Article Materials Science Forum, vol. 857, 2016, pages 151-155 0255-5476 http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41461 http://dx.doi.org/10.4028/www.scientific.net/MSF.857.151 en International Conference on Advanced Materials Engineering and Technology;ICAMET 2015 Trans Tech Publications Ltd
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Box-behnken design
DoE
MACE
RSM
Si nanostructures
spellingShingle Box-behnken design
DoE
MACE
RSM
Si nanostructures
Ayu Wazira, Azhari
Kamaruzzaman, Sopian
Dewi Suriyani, Che Halin
Abdul Haqi, Ibrahim
Saleem Hussain, Zaidi
Response surface methodology (RSM) in fabrication of nanostructured silicon
description Link to publisher's homepage at http://www.ttp.net/
author2 abdulhaqi@unimap.edu.my
author_facet abdulhaqi@unimap.edu.my
Ayu Wazira, Azhari
Kamaruzzaman, Sopian
Dewi Suriyani, Che Halin
Abdul Haqi, Ibrahim
Saleem Hussain, Zaidi
format Article
author Ayu Wazira, Azhari
Kamaruzzaman, Sopian
Dewi Suriyani, Che Halin
Abdul Haqi, Ibrahim
Saleem Hussain, Zaidi
author_sort Ayu Wazira, Azhari
title Response surface methodology (RSM) in fabrication of nanostructured silicon
title_short Response surface methodology (RSM) in fabrication of nanostructured silicon
title_full Response surface methodology (RSM) in fabrication of nanostructured silicon
title_fullStr Response surface methodology (RSM) in fabrication of nanostructured silicon
title_full_unstemmed Response surface methodology (RSM) in fabrication of nanostructured silicon
title_sort response surface methodology (rsm) in fabrication of nanostructured silicon
publisher Trans Tech Publications Ltd
publishDate 2016
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41461
_version_ 1643799673845055488
score 13.211869

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