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Effect of pyrolysis on shrinkage properties of SU-8 polymer

Epoxy SU-8 has drawn a lot of attention during the last decades due to its promising mechanical and electrical properties. Extensive research regarding the mechanical properties of negative photoresists SU-8 has been carried out during the last decades. A lot of effort has been put into developin...

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Main Author: Waled Ashor, M. Galy
Other Authors: Dr. Sharifah Shahnaz Syed Bakar
Format: Thesis
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2016
Subjects:
Polymer
SU-8 polymer
Pyrolysis
SU-8 polymer > Analysis
SU-8
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41295
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spelling my.unimap-412952016-04-13T06:26:35Z Effect of pyrolysis on shrinkage properties of SU-8 polymer Waled Ashor, M. Galy Dr. Sharifah Shahnaz Syed Bakar Polymer SU-8 polymer Pyrolysis SU-8 polymer -- Analysis SU-8 Epoxy SU-8 has drawn a lot of attention during the last decades due to its promising mechanical and electrical properties. Extensive research regarding the mechanical properties of negative photoresists SU-8 has been carried out during the last decades. A lot of effort has been put into developing methods to properly characterize features such as effect of pyrolysis temperature and the pyrolysis time on shrinkage properties and morphology of SU-8. In this work photo patterned SU-8 were fabricated on silicon wafers by spin process for different speed steps (step (1) 250rpm and time 10sec, step (2) 450rpm and time 30sec, step (3) 0rpm and time 5sec), then Soft baked at 95°C for 4min before cooling for 10min. Exposure to ultraviolet (UV) light was necessary to obtain the shape of the mask, increase crosslinking degree in the irradiated areas and stabilizes them against the action of solvents during development step. The density of UV used was 6 mW/cm2 at 365 nm and exposure time was 5min, while the volume of SU-8 developer was 40cm3 at 10min. Samples were cut into 2cmx2cm dimensions. The pyrolysis was carried out in a closed quartz tube furnace in an inert nitrogen gas (N2) flow at 1500 standard cubic centimeters per minute (SCCM) and different parameter of temperature (350oC, 400oC, 450oC and 500oC) and time (10min and 20min). Peeling of the SU-8 occurs due to a poor adhesion of the resist to the substrate, thicker films or faster heating rates during the pyrolysis of SU-8. Increasing pyrolysis parameters (temperature and time) lead to larger vertical and horizontal shrinkage, lower sheet resistivity and roughness. The scanning electron microscope (SEM), atomic force microscopy (AFM) and profilometer were used to examine the shrinkage and roughness of SU-8, in order to gain an understanding of how it can affect the shrinkage properties and determine the optimized pyrolysis conditions. 2016-04-13T06:26:35Z 2016-04-13T06:26:35Z 2013 Thesis http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41295 en Universiti Malaysia Perlis (UniMAP) School of Materials Engineering
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Polymer
SU-8 polymer
Pyrolysis
SU-8 polymer -- Analysis
SU-8
spellingShingle Polymer
SU-8 polymer
Pyrolysis
SU-8 polymer -- Analysis
SU-8
Waled Ashor, M. Galy
Effect of pyrolysis on shrinkage properties of SU-8 polymer
description Epoxy SU-8 has drawn a lot of attention during the last decades due to its promising mechanical and electrical properties. Extensive research regarding the mechanical properties of negative photoresists SU-8 has been carried out during the last decades. A lot of effort has been put into developing methods to properly characterize features such as effect of pyrolysis temperature and the pyrolysis time on shrinkage properties and morphology of SU-8. In this work photo patterned SU-8 were fabricated on silicon wafers by spin process for different speed steps (step (1) 250rpm and time 10sec, step (2) 450rpm and time 30sec, step (3) 0rpm and time 5sec), then Soft baked at 95°C for 4min before cooling for 10min. Exposure to ultraviolet (UV) light was necessary to obtain the shape of the mask, increase crosslinking degree in the irradiated areas and stabilizes them against the action of solvents during development step. The density of UV used was 6 mW/cm2 at 365 nm and exposure time was 5min, while the volume of SU-8 developer was 40cm3 at 10min. Samples were cut into 2cmx2cm dimensions. The pyrolysis was carried out in a closed quartz tube furnace in an inert nitrogen gas (N2) flow at 1500 standard cubic centimeters per minute (SCCM) and different parameter of temperature (350oC, 400oC, 450oC and 500oC) and time (10min and 20min). Peeling of the SU-8 occurs due to a poor adhesion of the resist to the substrate, thicker films or faster heating rates during the pyrolysis of SU-8. Increasing pyrolysis parameters (temperature and time) lead to larger vertical and horizontal shrinkage, lower sheet resistivity and roughness. The scanning electron microscope (SEM), atomic force microscopy (AFM) and profilometer were used to examine the shrinkage and roughness of SU-8, in order to gain an understanding of how it can affect the shrinkage properties and determine the optimized pyrolysis conditions.
author2 Dr. Sharifah Shahnaz Syed Bakar
author_facet Dr. Sharifah Shahnaz Syed Bakar
Waled Ashor, M. Galy
format Thesis
author Waled Ashor, M. Galy
author_sort Waled Ashor, M. Galy
title Effect of pyrolysis on shrinkage properties of SU-8 polymer
title_short Effect of pyrolysis on shrinkage properties of SU-8 polymer
title_full Effect of pyrolysis on shrinkage properties of SU-8 polymer
title_fullStr Effect of pyrolysis on shrinkage properties of SU-8 polymer
title_full_unstemmed Effect of pyrolysis on shrinkage properties of SU-8 polymer
title_sort effect of pyrolysis on shrinkage properties of su-8 polymer
publisher Universiti Malaysia Perlis (UniMAP)
publishDate 2016
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41295
_version_ 1643799608288083968
score 13.222552

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