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Design and analysis of various microcantilever shapes for MEMS based sensing

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Main Authors: Huzein Fahmi, Hawari, Yufridin, Wahab, Dr., M. T., Azmi, Ali Yeon, Md Shakaff, Prof. Dr., Uda, Hashim, Prof. Dr., Shazlina, Johari, Dr.
Other Authors: huzeinfahmi@gmail.com
Format: Article
Language:English
Published: Institute of Physics Publishing 2015
Subjects:
Composite micromechanics
Micro-cantilevers
Chemical sensors
Maximum deflection
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/39546
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spelling my.unimap-395462015-04-22T04:08:35Z Design and analysis of various microcantilever shapes for MEMS based sensing Huzein Fahmi, Hawari Yufridin, Wahab, Dr. M. T., Azmi Ali Yeon, Md Shakaff, Prof. Dr. Uda, Hashim, Prof. Dr. Shazlina, Johari, Dr. huzeinfahmi@gmail.com yufridin@unimap.edu.my aliyeon@unimap.edu.my uda@unimap.edu.my shazlinajohari@unimap.edu.my Composite micromechanics Micro-cantilevers Chemical sensors Maximum deflection Link to publisher's homepage at http://iopscience.iop.org/ One the major requirements for sensing devices is its sensitivity. This paper presents the design, analysis and simulation of various types of MEMS based microcantilevers shapes and their influence on sensing sensitivity. A commercial finite element analysis software ANSYS is used to analyze the designs. Six different analytical model of the microcantilever were investigated for its Equivalent (von-Mises) stress, maximum deflection and fundamental resonant frequency. Finally, the best sensitive structure is then identified. It is found that the trapezoidal design microcantilever would have significant sensing advantages compared to other remaining microcantilever shape. 2015-04-22T04:08:35Z 2015-04-22T04:08:35Z 2014 Article Journal of Physics: Conference Series, vol. 495(1), 2014, pages 1-9 1742-6588 iopscience.iop.1/012045/org/1742-6596/495/ http://dspace.unimap.edu.my:80/xmlui/handle/123456789/39546 en Institute of Physics Publishing
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Composite micromechanics
Micro-cantilevers
Chemical sensors
Maximum deflection
spellingShingle Composite micromechanics
Micro-cantilevers
Chemical sensors
Maximum deflection
Huzein Fahmi, Hawari
Yufridin, Wahab, Dr.
M. T., Azmi
Ali Yeon, Md Shakaff, Prof. Dr.
Uda, Hashim, Prof. Dr.
Shazlina, Johari, Dr.
Design and analysis of various microcantilever shapes for MEMS based sensing
description Link to publisher's homepage at http://iopscience.iop.org/
author2 huzeinfahmi@gmail.com
author_facet huzeinfahmi@gmail.com
Huzein Fahmi, Hawari
Yufridin, Wahab, Dr.
M. T., Azmi
Ali Yeon, Md Shakaff, Prof. Dr.
Uda, Hashim, Prof. Dr.
Shazlina, Johari, Dr.
format Article
author Huzein Fahmi, Hawari
Yufridin, Wahab, Dr.
M. T., Azmi
Ali Yeon, Md Shakaff, Prof. Dr.
Uda, Hashim, Prof. Dr.
Shazlina, Johari, Dr.
author_sort Huzein Fahmi, Hawari
title Design and analysis of various microcantilever shapes for MEMS based sensing
title_short Design and analysis of various microcantilever shapes for MEMS based sensing
title_full Design and analysis of various microcantilever shapes for MEMS based sensing
title_fullStr Design and analysis of various microcantilever shapes for MEMS based sensing
title_full_unstemmed Design and analysis of various microcantilever shapes for MEMS based sensing
title_sort design and analysis of various microcantilever shapes for mems based sensing
publisher Institute of Physics Publishing
publishDate 2015
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/39546
_version_ 1643799101003792384
score 13.211869

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