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Nanoelectrode chrome photomask design and specification for biosensor fabrication

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Bibliographic Details
Main Authors: Balakrishnan, Sharma Rao, Uda, Hashim, Prof. Dr.
Other Authors: bala.sharmarao@gmail.com
Format: Article
Language:English
Published: Trans Tech Publications 2014
Subjects:
AutoCAD
Biosensor
Chrome photomask
Clinical diagnostics
Critical dimension
Nano diagnostic
Nanoelectrode
Photolithography
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/35571
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spelling my.unimap-355712014-06-16T06:34:27Z Nanoelectrode chrome photomask design and specification for biosensor fabrication Balakrishnan, Sharma Rao Uda, Hashim, Prof. Dr. bala.sharmarao@gmail.com uda@unimap.edu.my AutoCAD Biosensor Chrome photomask Clinical diagnostics Critical dimension Nano diagnostic Nanoelectrode Photolithography Link to publisher's homepage at http://www.ttp.net/ This paper explains the most crucial part of any microchip fabrication, which is the mask design for photolithography process. The design is initially sketched roughly to meet the design specification and later on designed using AutoCAD software. Therefore, to meet the required criteria, the overall width and length of the device is optimized at 12mm and 20.21mm respectively. Optimization of the size is done based on the chip behavior as a disposable chip and adding an economical value when it is commercialized. The nano electrode mask layout comprises of four sets of design which are single gaps for size reduction, single gaps for size expansion, multiple gaps for size reduction and multiple gaps for size expansion. While, the second chrome mask is fabricated for gold contact padding with two types of design sets, one is for single gaps and another is for multiple gaps. Both mask designs were sent for chrome mask fabrication for future use in biosensor fabrication. 2014-06-16T06:34:27Z 2014-06-16T06:34:27Z 2013 Article Advanced Materials Research, vol. 795, 2013, pages 397-402 978-303785811-0 1022-6680 http://www.scientific.net/AMR.795.397 http://dspace.unimap.edu.my:80/dspace/handle/123456789/35571 en Trans Tech Publications
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic AutoCAD
Biosensor
Chrome photomask
Clinical diagnostics
Critical dimension
Nano diagnostic
Nanoelectrode
Photolithography
spellingShingle AutoCAD
Biosensor
Chrome photomask
Clinical diagnostics
Critical dimension
Nano diagnostic
Nanoelectrode
Photolithography
Balakrishnan, Sharma Rao
Uda, Hashim, Prof. Dr.
Nanoelectrode chrome photomask design and specification for biosensor fabrication
description Link to publisher's homepage at http://www.ttp.net/
author2 bala.sharmarao@gmail.com
author_facet bala.sharmarao@gmail.com
Balakrishnan, Sharma Rao
Uda, Hashim, Prof. Dr.
format Article
author Balakrishnan, Sharma Rao
Uda, Hashim, Prof. Dr.
author_sort Balakrishnan, Sharma Rao
title Nanoelectrode chrome photomask design and specification for biosensor fabrication
title_short Nanoelectrode chrome photomask design and specification for biosensor fabrication
title_full Nanoelectrode chrome photomask design and specification for biosensor fabrication
title_fullStr Nanoelectrode chrome photomask design and specification for biosensor fabrication
title_full_unstemmed Nanoelectrode chrome photomask design and specification for biosensor fabrication
title_sort nanoelectrode chrome photomask design and specification for biosensor fabrication
publisher Trans Tech Publications
publishDate 2014
url http://dspace.unimap.edu.my:80/dspace/handle/123456789/35571
_version_ 1643797840082763776
score 13.211869

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