Design and fabrication of n-isfet using SI₃N₄/SIO₂ structure for pH measurement
The design and fabrication of n-ISFET using Si₃N₄/SiO₂ structure for pH measurement has been carried out. In general Ion Sensitive Field Effect Transistor (ISFET) is a potentiometric pH sensor which widely used in chemical, biochemical and biomedical applications due to its advantages such as small...
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| Format: | Thesis |
| Language: | English |
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Universiti Malaysia Perlis (UniMAP)
2014
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| Subjects: | |
| Online Access: | http://dspace.unimap.edu.my:80/dspace/handle/123456789/32470 |
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