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Technology development for nano structure formation: Fabrication and characterization

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Bibliographic Details
Main Authors:	Tijjani Adam, Shuwa, Uda, Hashim, Prof. Dr., Foo, Kai Loong, Dhahi, Th Sabar, Nazwa, Taib
Other Authors:	tijjaniadam@yahoo.com.my
Format:	Article
Language:	English
Published:	American Scientific Publishers 2014
Subjects:	Dielectric analyzer E-beam lithography fabrication FESEM Nano structure
Online Access:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/32434
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