Characteristics of nanostructure silicon photodiode using laser assisted etching
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2014
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my.unimap-323362014-03-04T13:49:56Z Characteristics of nanostructure silicon photodiode using laser assisted etching Naser Mahmoud, Ahmed, Dr. Yarub, Al-Douri, Assoc. Prof. Dr. Alwan, M. Alwan Ghassan Ezzulddin, Arif Allaa A., Jabbar naser@usm.my yarub@unimap.edu.my Nanostructures silicon photodiode (nPSi) Laser assisted etching Link to publisher's homepage at www.elsevier.com We prepared nanostructures silicon photodiode (nPSi) by using laser assisted etching at fixed current density (30 mA/cm2) with different etching wavelengths of laser diode (532, 650 and 810 nm), a (metal/nanostructure silicon/metal) photodiode has been fabricated from rapid thermal oxidation (RTO) and rapid thermal annealing (RTA) processes to improve the characterizations of PSi photodiode, A responsivity of (3A/w) was measured at (450 nm) with low value of dark current (1.33 μA/cm2) and higher value of photo current (610 μA/cm2) at 5 volt reverse bias. The results show that the wavelength IR (810 nm) give us the best photodiode and electrical characteristics 2014-03-04T13:49:56Z 2014-03-04T13:49:56Z 2013 Article Procedia Engineering, vol. 53, 2013, pages 393-399 978-162748634-7 1877-7058 http://www.sciencedirect.com/science/article/pii/S1877705813001707 http://dspace.unimap.edu.my:80/dspace/handle/123456789/32336 en Elsevier B.V. |
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English |
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Nanostructures silicon photodiode (nPSi) Laser assisted etching |
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Nanostructures silicon photodiode (nPSi) Laser assisted etching Naser Mahmoud, Ahmed, Dr. Yarub, Al-Douri, Assoc. Prof. Dr. Alwan, M. Alwan Ghassan Ezzulddin, Arif Allaa A., Jabbar Characteristics of nanostructure silicon photodiode using laser assisted etching |
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Link to publisher's homepage at www.elsevier.com |
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naser@usm.my |
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naser@usm.my Naser Mahmoud, Ahmed, Dr. Yarub, Al-Douri, Assoc. Prof. Dr. Alwan, M. Alwan Ghassan Ezzulddin, Arif Allaa A., Jabbar |
| format |
Article |
| author |
Naser Mahmoud, Ahmed, Dr. Yarub, Al-Douri, Assoc. Prof. Dr. Alwan, M. Alwan Ghassan Ezzulddin, Arif Allaa A., Jabbar |
| author_sort |
Naser Mahmoud, Ahmed, Dr. |
| title |
Characteristics of nanostructure silicon photodiode using laser assisted etching |
| title_short |
Characteristics of nanostructure silicon photodiode using laser assisted etching |
| title_full |
Characteristics of nanostructure silicon photodiode using laser assisted etching |
| title_fullStr |
Characteristics of nanostructure silicon photodiode using laser assisted etching |
| title_full_unstemmed |
Characteristics of nanostructure silicon photodiode using laser assisted etching |
| title_sort |
characteristics of nanostructure silicon photodiode using laser assisted etching |
| publisher |
Elsevier B.V. |
| publishDate |
2014 |
| url |
http://dspace.unimap.edu.my:80/dspace/handle/123456789/32336 |
| _version_ |
1643796865381040128 |
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13.222552 |