Capacitive micromachined ultrasonic tranducers: Technology and application
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Elsevier B.V.
2014
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my.unimap-315832015-07-14T01:32:52Z Capacitive micromachined ultrasonic tranducers: Technology and application Muhammed Sabri, Salim Mohd Fareq, Abd. Malek, Dr. Boon, Raymond Whee Heng, Prof. Dr. Khairudi, Mohd Juni. Naseer, Sabri mfareq@unimap.edu.my rbwheng@unimap.edu.my naseersabri@yahoo.com Capacitive micromachined ultrasonic transducer Fabrication Image sensors Ultrasonography Link to publisher’s homepage at http://www.elsevier.com/ Capacitive micromachined ultrasonic tranducers (cMUTs) have recently emerged as an alternative to conventional piezoelectric transducers. They offer many advantages in terms of bandwidth, fabrication of layer arrays, efficiency, and sensitivity. This research presents the principles of operation, fabrication process steps, and application of the capacitive micromachined ultrasound transducer. The study also demonstrates in detail the collapse voltage design parameter of a cMUT membrane. Several important applications are presented to show the feasibility of using cMUTs which are demonstrated by imaging examples in immersion and air due to the cMUT capability of producing large bandwidth (123% fractional bandwidth) and lower impedance mismatch. Finally, the advantages of three-dimensional echographic images based on moving ultrasound linear array its technique are discussed in detail and compared with those of two-dimensional optical hand geometry. 2014-01-28T09:05:26Z 2014-01-28T09:05:26Z 2012-03 Article Journal of Medical Ultrasound, vol. 20(1), 2012, pages 8-31 0929-6441 http://www.sciencedirect.com/science/article/pii/S0929644112000094 http://dspace.unimap.edu.my:80/dspace/handle/123456789/31583 en Elsevier B.V. |
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Asia |
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Malaysia |
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Universiti Malaysia Perlis |
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http://dspace.unimap.edu.my/ |
| language |
English |
| topic |
Capacitive micromachined ultrasonic transducer Fabrication Image sensors Ultrasonography |
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Capacitive micromachined ultrasonic transducer Fabrication Image sensors Ultrasonography Muhammed Sabri, Salim Mohd Fareq, Abd. Malek, Dr. Boon, Raymond Whee Heng, Prof. Dr. Khairudi, Mohd Juni. Naseer, Sabri Capacitive micromachined ultrasonic tranducers: Technology and application |
| description |
Link to publisher’s homepage at http://www.elsevier.com/ |
| author2 |
mfareq@unimap.edu.my |
| author_facet |
mfareq@unimap.edu.my Muhammed Sabri, Salim Mohd Fareq, Abd. Malek, Dr. Boon, Raymond Whee Heng, Prof. Dr. Khairudi, Mohd Juni. Naseer, Sabri |
| format |
Article |
| author |
Muhammed Sabri, Salim Mohd Fareq, Abd. Malek, Dr. Boon, Raymond Whee Heng, Prof. Dr. Khairudi, Mohd Juni. Naseer, Sabri |
| author_sort |
Muhammed Sabri, Salim |
| title |
Capacitive micromachined ultrasonic tranducers: Technology and application |
| title_short |
Capacitive micromachined ultrasonic tranducers: Technology and application |
| title_full |
Capacitive micromachined ultrasonic tranducers: Technology and application |
| title_fullStr |
Capacitive micromachined ultrasonic tranducers: Technology and application |
| title_full_unstemmed |
Capacitive micromachined ultrasonic tranducers: Technology and application |
| title_sort |
capacitive micromachined ultrasonic tranducers: technology and application |
| publisher |
Elsevier B.V. |
| publishDate |
2014 |
| url |
http://dspace.unimap.edu.my:80/dspace/handle/123456789/31583 |
| _version_ |
1643796598872866816 |
| score |
13.251813 |