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Capacitive micromachined ultrasonic tranducers: Technology and application

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Main Authors: Muhammed Sabri, Salim, Mohd Fareq, Abd. Malek, Dr., Boon, Raymond Whee Heng, Prof. Dr., Khairudi, Mohd Juni., Naseer, Sabri
Other Authors: mfareq@unimap.edu.my
Format: Article
Language:English
Published: Elsevier B.V. 2014
Subjects:
Capacitive micromachined ultrasonic transducer
Fabrication
Image sensors
Ultrasonography
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/31583
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spelling my.unimap-315832015-07-14T01:32:52Z Capacitive micromachined ultrasonic tranducers: Technology and application Muhammed Sabri, Salim Mohd Fareq, Abd. Malek, Dr. Boon, Raymond Whee Heng, Prof. Dr. Khairudi, Mohd Juni. Naseer, Sabri mfareq@unimap.edu.my rbwheng@unimap.edu.my naseersabri@yahoo.com Capacitive micromachined ultrasonic transducer Fabrication Image sensors Ultrasonography Link to publisher’s homepage at http://www.elsevier.com/ Capacitive micromachined ultrasonic tranducers (cMUTs) have recently emerged as an alternative to conventional piezoelectric transducers. They offer many advantages in terms of bandwidth, fabrication of layer arrays, efficiency, and sensitivity. This research presents the principles of operation, fabrication process steps, and application of the capacitive micromachined ultrasound transducer. The study also demonstrates in detail the collapse voltage design parameter of a cMUT membrane. Several important applications are presented to show the feasibility of using cMUTs which are demonstrated by imaging examples in immersion and air due to the cMUT capability of producing large bandwidth (123% fractional bandwidth) and lower impedance mismatch. Finally, the advantages of three-dimensional echographic images based on moving ultrasound linear array its technique are discussed in detail and compared with those of two-dimensional optical hand geometry. 2014-01-28T09:05:26Z 2014-01-28T09:05:26Z 2012-03 Article Journal of Medical Ultrasound, vol. 20(1), 2012, pages 8-31 0929-6441 http://www.sciencedirect.com/science/article/pii/S0929644112000094 http://dspace.unimap.edu.my:80/dspace/handle/123456789/31583 en Elsevier B.V.
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Capacitive micromachined ultrasonic transducer
Fabrication
Image sensors
Ultrasonography
spellingShingle Capacitive micromachined ultrasonic transducer
Fabrication
Image sensors
Ultrasonography
Muhammed Sabri, Salim
Mohd Fareq, Abd. Malek, Dr.
Boon, Raymond Whee Heng, Prof. Dr.
Khairudi, Mohd Juni.
Naseer, Sabri
Capacitive micromachined ultrasonic tranducers: Technology and application
description Link to publisher’s homepage at http://www.elsevier.com/
author2 mfareq@unimap.edu.my
author_facet mfareq@unimap.edu.my
Muhammed Sabri, Salim
Mohd Fareq, Abd. Malek, Dr.
Boon, Raymond Whee Heng, Prof. Dr.
Khairudi, Mohd Juni.
Naseer, Sabri
format Article
author Muhammed Sabri, Salim
Mohd Fareq, Abd. Malek, Dr.
Boon, Raymond Whee Heng, Prof. Dr.
Khairudi, Mohd Juni.
Naseer, Sabri
author_sort Muhammed Sabri, Salim
title Capacitive micromachined ultrasonic tranducers: Technology and application
title_short Capacitive micromachined ultrasonic tranducers: Technology and application
title_full Capacitive micromachined ultrasonic tranducers: Technology and application
title_fullStr Capacitive micromachined ultrasonic tranducers: Technology and application
title_full_unstemmed Capacitive micromachined ultrasonic tranducers: Technology and application
title_sort capacitive micromachined ultrasonic tranducers: technology and application
publisher Elsevier B.V.
publishDate 2014
url http://dspace.unimap.edu.my:80/dspace/handle/123456789/31583
_version_ 1643796598872866816
score 13.22586

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