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Design and fabrication of SWNT-FET based biosensor

Nanotubes have generated intense research activities from scientists of various disciplines because they represent a new class of materials for the study of one-dimensional physics. Single-walled carbon nanotubes (SWNTs) have many other magnificent properties and it has impressive properties in thre...

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Main Author:	Mohd Syamsul Nasyriq, Samsol Baharin
Format:	Thesis
Language:	English
Published:	Universiti Malaysia Perlis (UniMAP) 2014
Subjects:	Biosensor Single-walled carbon nanotubes (SWNTs) Field effect transistor (FET) Carbon nanotube Medical diagnostic application Carbon nanotube based biosensor
Online Access:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/31303
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spelling	my.unimap-313032014-01-19T07:57:04Z Design and fabrication of SWNT-FET based biosensor Mohd Syamsul Nasyriq, Samsol Baharin Biosensor Single-walled carbon nanotubes (SWNTs) Field effect transistor (FET) Carbon nanotube Medical diagnostic application Carbon nanotube based biosensor Nanotubes have generated intense research activities from scientists of various disciplines because they represent a new class of materials for the study of one-dimensional physics. Single-walled carbon nanotubes (SWNTs) have many other magnificent properties and it has impressive properties in three aspects, mechanical, electrical and biological due to ability of single-walled carbon nanotubes (SWNTs) to exhibit self-assemble monolayer (SAM). The main objective of this project is to design and fabricate carbon nanotube based biosensor for future application medical diagnostics. The electrical transport of semiconducting single-walled carbon nanotubes with the diameter of ~1.5 nm and length of 2 μm to 6 μm for its applications as biomolecules detection was investigated. Single-walled carbon nanotubes field effect transistors (SWNT-FET) were fabricated in house using three masks designed. Initially backgated field effect transistor (FET) was formed and followed with the growth of oxide as insulation layer. Multilayer metal of platinum,Pt and gold,Au were grown on top of oxide layer and finalized with the integration of single-walled carbon nanotubes (SWNTs). The oxide thickness achieved is ~18nm and multilayer metal of platinum,Pt and gold,Au thickness is ~10nm and ~90nm respectively. The integration of single-walled carbon nanotubes (SWNTs) with field effect transistor (FET) was performed using AC dielectrophoresis nanomanipulation technique resulting promising results of integration proven via Scanning Electron Microscope (SEM). Fabricated device resulting conductance of G ~ 0.03 x 4e2/h and hole mobility of μp ~ 3060 cm2/V.s in saturation mode. This device also shows resemblances with conventional p-type metal-oxide-semiconductor FETs (MOSFETs) through IDS-VDS curve and appears to be gate voltage dependence through conductance-gate voltage curve. Thus, these results prove that fabricated device functioned as p-type metal-oxide-semiconductor FETs (MOSFETs) and can be used for the application of biomolecules detection such as protein by monitoring the device changes of IDS-VDS characteristics. 2014-01-19T07:57:04Z 2014-01-19T07:57:04Z 2012 Thesis http://dspace.unimap.edu.my:80/dspace/handle/123456789/31303 en Universiti Malaysia Perlis (UniMAP) Institute of Nanoelectronic Engineering
institution	Universiti Malaysia Perlis
building	UniMAP Library
collection	Institutional Repository
continent	Asia
country	Malaysia
content_provider	Universiti Malaysia Perlis
content_source	UniMAP Library Digital Repository
url_provider	http://dspace.unimap.edu.my/
language	English
topic	Biosensor Single-walled carbon nanotubes (SWNTs) Field effect transistor (FET) Carbon nanotube Medical diagnostic application Carbon nanotube based biosensor
spellingShingle	Biosensor Single-walled carbon nanotubes (SWNTs) Field effect transistor (FET) Carbon nanotube Medical diagnostic application Carbon nanotube based biosensor Mohd Syamsul Nasyriq, Samsol Baharin Design and fabrication of SWNT-FET based biosensor
description	Nanotubes have generated intense research activities from scientists of various disciplines because they represent a new class of materials for the study of one-dimensional physics. Single-walled carbon nanotubes (SWNTs) have many other magnificent properties and it has impressive properties in three aspects, mechanical, electrical and biological due to ability of single-walled carbon nanotubes (SWNTs) to exhibit self-assemble monolayer (SAM). The main objective of this project is to design and fabricate carbon nanotube based biosensor for future application medical diagnostics. The electrical transport of semiconducting single-walled carbon nanotubes with the diameter of ~1.5 nm and length of 2 μm to 6 μm for its applications as biomolecules detection was investigated. Single-walled carbon nanotubes field effect transistors (SWNT-FET) were fabricated in house using three masks designed. Initially backgated field effect transistor (FET) was formed and followed with the growth of oxide as insulation layer. Multilayer metal of platinum,Pt and gold,Au were grown on top of oxide layer and finalized with the integration of single-walled carbon nanotubes (SWNTs). The oxide thickness achieved is ~18nm and multilayer metal of platinum,Pt and gold,Au thickness is ~10nm and ~90nm respectively. The integration of single-walled carbon nanotubes (SWNTs) with field effect transistor (FET) was performed using AC dielectrophoresis nanomanipulation technique resulting promising results of integration proven via Scanning Electron Microscope (SEM). Fabricated device resulting conductance of G ~ 0.03 x 4e2/h and hole mobility of μp ~ 3060 cm2/V.s in saturation mode. This device also shows resemblances with conventional p-type metal-oxide-semiconductor FETs (MOSFETs) through IDS-VDS curve and appears to be gate voltage dependence through conductance-gate voltage curve. Thus, these results prove that fabricated device functioned as p-type metal-oxide-semiconductor FETs (MOSFETs) and can be used for the application of biomolecules detection such as protein by monitoring the device changes of IDS-VDS characteristics.
format	Thesis
author	Mohd Syamsul Nasyriq, Samsol Baharin
author_facet	Mohd Syamsul Nasyriq, Samsol Baharin
author_sort	Mohd Syamsul Nasyriq, Samsol Baharin
title	Design and fabrication of SWNT-FET based biosensor
title_short	Design and fabrication of SWNT-FET based biosensor
title_full	Design and fabrication of SWNT-FET based biosensor
title_fullStr	Design and fabrication of SWNT-FET based biosensor
title_full_unstemmed	Design and fabrication of SWNT-FET based biosensor
title_sort	design and fabrication of swnt-fet based biosensor
publisher	Universiti Malaysia Perlis (UniMAP)
publishDate	2014
url	http://dspace.unimap.edu.my:80/dspace/handle/123456789/31303
_version_	1643796472743854080
score	13.211869

Design and fabrication of SWNT-FET based biosensor

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