Development and fabrication of Ion-sensitive Field Effect Transistor (ISFET) for pH detection, DNA immobilization and hybridization
The fabrication of ion sensitive field-effect transistor (ISFET) using silicon nitride (Si3N4) as the sensing membrane is reported. The operation of ISFET is based on the surface charge adsorption of the membrane-solution interface. This thesis describes the design, fabrication and characterization...
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Main Author: | Chong, Soon Weng |
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Format: | Thesis |
Language: | English |
Published: |
Universiti Malaysia Perlis (UniMAP)
2014
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Online Access: | http://dspace.unimap.edu.my:80/dspace/handle/123456789/31211 |
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