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Microfluidic channel depth determination with Tywman-Green interferometer

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Main Authors: Wan Mokhdzani, Wan Nor Haimi, Zaliman, Sauli, Prof. Madya Dr., Retnasamy, Vithyacharan, Taniselass, S., N., Ramli, M. H. A. Aziz, R., Hatta
Other Authors: wanmokhdzani@unimap.edu.my
Format: Article
Language:English
Published: Springer-Verlag London. 2013
Subjects:
Fringe shifting
Microchannel
Reactive ion etching (RIE)
Twyman-Green interferometer (TGI)
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/26242
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spelling my.unimap-262422013-07-13T01:05:35Z Microfluidic channel depth determination with Tywman-Green interferometer Wan Mokhdzani, Wan Nor Haimi Zaliman, Sauli, Prof. Madya Dr. Retnasamy, Vithyacharan Taniselass, S. N., Ramli M. H. A. Aziz R., Hatta wanmokhdzani@unimap.edu.my Fringe shifting Microchannel Reactive ion etching (RIE) Twyman-Green interferometer (TGI) Link to publisher's homepage at http://link.springer.com/ A microfluidic channel is fabricated on a silica wafer using reactive ion etching (RIE). The depth of the microfluidic channel has been measured using a surface profilometer and a Twyman-Green interferometer (TGI) setup. The TGI setup which mainly consists of a 660-nm wavelength He-Ne laser source, glass cube beam splitter and two prisms produced interference fringes based on the optical path difference between two interfering beams when the microfluidic channel is inserted into one of the beams. The TGI setup that was developed has shown high repeatability when measuring microfluidic channel depth and also eliminates back injection into the laser source and alignment criticality. The TGI setup applied a single photodiode to detect the shifting of the bright and dark fringe produced from the interference of the TGI. The depth of microfluidic channel obtained from the TGI is 1.79 ± 0.31 μm using fringe shifting and intensity measurements, while according to the surface profilometer the depth of microfluidic channel obtained is 1.67 ± 0.07 μm. The resolution of the TGI is 0.25 μm and can still go well below that depending on the wavelength of the laser source. This research describes the capability of the TGI to perform depth measurements on a microfluidic channel of a silica substrate which can also be improvised for other microscale devices and applications. 2013-06-27T02:31:48Z 2013-06-27T02:31:48Z 2013-07 Article The International Journal of Advanced Manufacturing Technology, 2013, vol. 67(1-4), pages 851-855 0268-3768 http://link.springer.com/article/10.1007%2Fs00170-012-4528-y http://hdl.handle.net/123456789/26242 en Springer-Verlag London.
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Fringe shifting
Microchannel
Reactive ion etching (RIE)
Twyman-Green interferometer (TGI)
spellingShingle Fringe shifting
Microchannel
Reactive ion etching (RIE)
Twyman-Green interferometer (TGI)
Wan Mokhdzani, Wan Nor Haimi
Zaliman, Sauli, Prof. Madya Dr.
Retnasamy, Vithyacharan
Taniselass, S.
N., Ramli
M. H. A. Aziz
R., Hatta
Microfluidic channel depth determination with Tywman-Green interferometer
description Link to publisher's homepage at http://link.springer.com/
author2 wanmokhdzani@unimap.edu.my
author_facet wanmokhdzani@unimap.edu.my
Wan Mokhdzani, Wan Nor Haimi
Zaliman, Sauli, Prof. Madya Dr.
Retnasamy, Vithyacharan
Taniselass, S.
N., Ramli
M. H. A. Aziz
R., Hatta
format Article
author Wan Mokhdzani, Wan Nor Haimi
Zaliman, Sauli, Prof. Madya Dr.
Retnasamy, Vithyacharan
Taniselass, S.
N., Ramli
M. H. A. Aziz
R., Hatta
author_sort Wan Mokhdzani, Wan Nor Haimi
title Microfluidic channel depth determination with Tywman-Green interferometer
title_short Microfluidic channel depth determination with Tywman-Green interferometer
title_full Microfluidic channel depth determination with Tywman-Green interferometer
title_fullStr Microfluidic channel depth determination with Tywman-Green interferometer
title_full_unstemmed Microfluidic channel depth determination with Tywman-Green interferometer
title_sort microfluidic channel depth determination with tywman-green interferometer
publisher Springer-Verlag London.
publishDate 2013
url http://dspace.unimap.edu.my/xmlui/handle/123456789/26242
_version_ 1643794882448326656
score 13.211869

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