Vertical-Lateral Thermal Actuator for MEMS design
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Universiti Malaysia Perlis
2008
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| Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/1999 |
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my.unimap-19992008-09-09T02:32:57Z Vertical-Lateral Thermal Actuator for MEMS design Muhammad Arefendy Ab. Rahim Hafiz Ismail (Advisor) Actuators Microelectromechanical systems Microelectronics Sensors Microelectromechanical systems -- Design and construction Access is limited to UniMAP community. Compact vertical and lateral thermal actuator has been design and simulation. The process of the simulation is to apply the current so it can make the arms hot enough to bend the design towards the cold arms. This current apply is called joule’s heating law that explain the material can produce thermal energy by applying a current through it. The simulation is done for various dimensions of thickness, width, and length to analyze it potential for greater deflection. The vertical lateral thermal actuator has the same value of deflection as the traditional actuator deflection and that’s mean the vertical lateral actuator can be more deflection than the traditional actuator. The way of deflection for this vertical lateral thermal actuator can be bidirectional according where the voltage applied to flow the current. The bidirectional can be vertical or lateral deflection. 2008-09-09T02:32:57Z 2008-09-09T02:32:57Z 2008-04 Learning Object http://hdl.handle.net/123456789/1999 en Universiti Malaysia Perlis School of Microelectronic Engineering |
| institution |
Universiti Malaysia Perlis |
| building |
UniMAP Library |
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Institutional Repository |
| continent |
Asia |
| country |
Malaysia |
| content_provider |
Universiti Malaysia Perlis |
| content_source |
UniMAP Library Digital Repository |
| url_provider |
http://dspace.unimap.edu.my/ |
| language |
English |
| topic |
Actuators Microelectromechanical systems Microelectronics Sensors Microelectromechanical systems -- Design and construction |
| spellingShingle |
Actuators Microelectromechanical systems Microelectronics Sensors Microelectromechanical systems -- Design and construction Muhammad Arefendy Ab. Rahim Vertical-Lateral Thermal Actuator for MEMS design |
| description |
Access is limited to UniMAP community. |
| author2 |
Hafiz Ismail (Advisor) |
| author_facet |
Hafiz Ismail (Advisor) Muhammad Arefendy Ab. Rahim |
| format |
Learning Object |
| author |
Muhammad Arefendy Ab. Rahim |
| author_sort |
Muhammad Arefendy Ab. Rahim |
| title |
Vertical-Lateral Thermal Actuator for MEMS design |
| title_short |
Vertical-Lateral Thermal Actuator for MEMS design |
| title_full |
Vertical-Lateral Thermal Actuator for MEMS design |
| title_fullStr |
Vertical-Lateral Thermal Actuator for MEMS design |
| title_full_unstemmed |
Vertical-Lateral Thermal Actuator for MEMS design |
| title_sort |
vertical-lateral thermal actuator for mems design |
| publisher |
Universiti Malaysia Perlis |
| publishDate |
2008 |
| url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/1999 |
| _version_ |
1643787518547591168 |
| score |
13.222552 |