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Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software

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Bibliographic Details
Main Author: Ruhaizi Mohd Hatta
Other Authors: Hasnizah Aris (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Capacitive pressure sensor
Detectors
Crystals
High-temperature sensor
Microelectromechanical systems
Transducers
Silicon
Silicon carbide
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/1989
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record_format dspace
spelling my.unimap-19892008-09-08T12:04:57Z Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software Ruhaizi Mohd Hatta Hasnizah Aris (Advisor) Capacitive pressure sensor Detectors Crystals High-temperature sensor Microelectromechanical systems Transducers Silicon Silicon carbide Access is limited to UniMAP community. Single crystal 3C-SiC capacitive pressure sensors are proposed for high-temperature sensing applications. SiC is an attractive material for harsh environment micromachined transducers due to its outstanding electrical, mechanical and chemical properties. The prototype device consists of an edge-clamped circular SiC diaphragm with a radius of 400 μm and a thickness of 0.5 μm suspended over a 2 μm sealed cavity on a silicon substrate. The fabricated sensor demonstrates a high temperature sensing capability up to 400oC, limited by the test setup. At 400oC, the device achieves a linear characteristic response between 1100 Torr and 1760 Torr with a sensitivity of 7.7 fF/Torr, a linearity of 2.1 %, a hysterisis of 3.7 %, and a sensing resolution of 9.1 Torr (12 mbar). 2008-09-08T12:04:57Z 2008-09-08T12:04:57Z 2008-03 Learning Object http://hdl.handle.net/123456789/1989 en Universiti Malaysia Perlis School of Microelectronic Engineering
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Capacitive pressure sensor
Detectors
Crystals
High-temperature sensor
Microelectromechanical systems
Transducers
Silicon
Silicon carbide
spellingShingle Capacitive pressure sensor
Detectors
Crystals
High-temperature sensor
Microelectromechanical systems
Transducers
Silicon
Silicon carbide
Ruhaizi Mohd Hatta
Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software
description Access is limited to UniMAP community.
author2 Hasnizah Aris (Advisor)
author_facet Hasnizah Aris (Advisor)
Ruhaizi Mohd Hatta
format Learning Object
author Ruhaizi Mohd Hatta
author_sort Ruhaizi Mohd Hatta
title Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software
title_short Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software
title_full Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software
title_fullStr Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software
title_full_unstemmed Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software
title_sort single crystal sic capacitive pressure sensor design and analysis using mems pro l-edit and samcef field & oofelie software
publisher Universiti Malaysia Perlis
publishDate 2008
url http://dspace.unimap.edu.my/xmlui/handle/123456789/1989
_version_ 1643787515541323776
score 13.211869

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