Design and simulation of Piezoresistive pressure sensor
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Universiti Malaysia Perlis
2008
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my.unimap-19852008-09-09T04:19:46Z Design and simulation of Piezoresistive pressure sensor Mohd Hilmi Mohd Nor Hasnizah Aris (Advisor) Piezoresistive Pressure sensor Integrated circuits Microelectronics Microelectromechanical systems MEMS sensors Access is limited to UniMAP community. The piezoresistive effect describes the changing electrical resistance of a material due to applied mechanical stress. Electrical resistor will change its resistance when it experiences a strain and deformation. Pressure sensor system consists of a diaphragm over a sealed cavity. The difference in pressure between opposing sides of the diaphragm causes a stress and possibly a displacement of the diaphragm. This thesis will discuss the stress occurs at the membrane due to applied surface force and the relationship between thickness, displacement and stress. 2008-09-08T08:19:45Z 2008-09-08T08:19:45Z 2008-03 Learning Object http://hdl.handle.net/123456789/1985 en Universiti Malaysia Perlis School of Microelectronic Engineering |
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Piezoresistive Pressure sensor Integrated circuits Microelectronics Microelectromechanical systems MEMS sensors |
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Piezoresistive Pressure sensor Integrated circuits Microelectronics Microelectromechanical systems MEMS sensors Mohd Hilmi Mohd Nor Design and simulation of Piezoresistive pressure sensor |
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Hasnizah Aris (Advisor) |
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Hasnizah Aris (Advisor) Mohd Hilmi Mohd Nor |
format |
Learning Object |
author |
Mohd Hilmi Mohd Nor |
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Mohd Hilmi Mohd Nor |
title |
Design and simulation of Piezoresistive pressure sensor |
title_short |
Design and simulation of Piezoresistive pressure sensor |
title_full |
Design and simulation of Piezoresistive pressure sensor |
title_fullStr |
Design and simulation of Piezoresistive pressure sensor |
title_full_unstemmed |
Design and simulation of Piezoresistive pressure sensor |
title_sort |
design and simulation of piezoresistive pressure sensor |
publisher |
Universiti Malaysia Perlis |
publishDate |
2008 |
url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/1985 |
_version_ |
1643787514351190016 |
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13.211869 |