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Plasma-assisted MBE growth of AlN/GaN/AlNheterostructures on Si (111) substrate

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Main Authors: M.Z. Mohd Yusoff, Azzafeerah Mahyuddin, Z. Hassan, Y. Yusof, M.A. Ahmad, C.W. Chin, H. Abu Hassan, M.J. Abdullah, (UniKL MIAT)
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Published: Elsevier 2014
Subjects:
AlN
XRD
TEM
EDS line analysis
Online Access:http://www.sciencedirect.com/science/article/pii/S0749603613001730
http://www.academia.edu/4275573/Plasma_assisted_MBEgrowthof_Al_NGa_NAl_Nheterostructures_on_Si111substrate
http://localhost/xmlui/handle/123456789/7381
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spelling my.unikl.ir-73812014-08-05T03:46:13Z Plasma-assisted MBE growth of AlN/GaN/AlNheterostructures on Si (111) substrate M.Z. Mohd Yusoff Azzafeerah Mahyuddin Z. Hassan Y. Yusof M.A. Ahmad C.W. Chin H. Abu Hassan M.J. Abdullah (UniKL MIAT) AlN XRD TEM EDS line analysis Full text article available in ScienceDirect.ScienceDirect is accessible through UniKL Library Website The microstructure properties of AlN/GaN/AlN heterostructures on Si (1 1 1) substrate grown by plasma-assisted molecular beam epitaxy (MBE) have been studied and investigated. Reflection high energy electron diffraction (RHEED), high-resolution X-ray diffraction (HR-XRD), transmission electron microscopy (TEM), and energy dispersive X-ray spectroscopy (EDS) analysis were used to investigate a reconstruction pattern, cross section, and crystalline quality of the AlN/GaN/AlN heterostructures on Si (1 1 1) susbstrate. The reflection high energy electron diffraction images indicated a good surface morphology of AlN/GaN/AlN heterostructures on Si (1 1 1) substrate. The full width at half maximum (FWHM) obtained from XRD measurement was 0.46° (27.6 arcmin), indicating a good quality layer of sample. From TEM measurements, it is found that the crystalline quality of the AlN/GaN/AlN heterostructures is good comparable with previous report. 2014-08-05T03:45:19Z 2014-08-05T03:45:19Z 2013-08 Mohd Yusoff, M. Z., Mahyuddin, A., Hassan, Z., Yusof, Y., Ahmad, M. A., Chin, C. W., … Abdullah, M. J. (2013). Plasma-assisted MBE growth of AlN/GaN/AlN heterostructures on Si (111) substrate. Superlattices and Microstructures, 60, 500–507. doi:10.1016/j.spmi.2013.05.034 http://www.sciencedirect.com/science/article/pii/S0749603613001730 http://www.academia.edu/4275573/Plasma_assisted_MBEgrowthof_Al_NGa_NAl_Nheterostructures_on_Si111substrate http://localhost/xmlui/handle/123456789/7381 Superlattices and Microstructures; Elsevier
institution Universiti Kuala Lumpur
building UniKL Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Kuala Lumpur
content_source UniKL Institutional Repository
url_provider http://ir.unikl.edu.my/
topic AlN
XRD
TEM
EDS line analysis
spellingShingle AlN
XRD
TEM
EDS line analysis
M.Z. Mohd Yusoff
Azzafeerah Mahyuddin
Z. Hassan
Y. Yusof
M.A. Ahmad
C.W. Chin
H. Abu Hassan
M.J. Abdullah
(UniKL MIAT)
Plasma-assisted MBE growth of AlN/GaN/AlNheterostructures on Si (111) substrate
description Full text article available in ScienceDirect.ScienceDirect is accessible through UniKL Library Website
format
author M.Z. Mohd Yusoff
Azzafeerah Mahyuddin
Z. Hassan
Y. Yusof
M.A. Ahmad
C.W. Chin
H. Abu Hassan
M.J. Abdullah
(UniKL MIAT)
author_facet M.Z. Mohd Yusoff
Azzafeerah Mahyuddin
Z. Hassan
Y. Yusof
M.A. Ahmad
C.W. Chin
H. Abu Hassan
M.J. Abdullah
(UniKL MIAT)
author_sort M.Z. Mohd Yusoff
title Plasma-assisted MBE growth of AlN/GaN/AlNheterostructures on Si (111) substrate
title_short Plasma-assisted MBE growth of AlN/GaN/AlNheterostructures on Si (111) substrate
title_full Plasma-assisted MBE growth of AlN/GaN/AlNheterostructures on Si (111) substrate
title_fullStr Plasma-assisted MBE growth of AlN/GaN/AlNheterostructures on Si (111) substrate
title_full_unstemmed Plasma-assisted MBE growth of AlN/GaN/AlNheterostructures on Si (111) substrate
title_sort plasma-assisted mbe growth of aln/gan/alnheterostructures on si (111) substrate
publisher Elsevier
publishDate 2014
url http://www.sciencedirect.com/science/article/pii/S0749603613001730
http://www.academia.edu/4275573/Plasma_assisted_MBEgrowthof_Al_NGa_NAl_Nheterostructures_on_Si111substrate
http://localhost/xmlui/handle/123456789/7381
_version_ 1644484926878253056
score 13.222552

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