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Study oftime deposition dependence of Cu20 films,fabricated by sputtering method

This research was conducted to fabricate films using p-types oxides. In this research, glass which has good transparency, Is used as a substrate while CU20 is used as p-type semiconductor target CU20 films were deposited on glass substrates by Radio Frequency (RF) sputtering method at different dura...

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Main Author: Norfarshah A. Rahman
Format: Academic Exercise
Language:English
Published: 2014
Subjects:
Q Science (General)
Online Access:https://eprints.ums.edu.my/id/eprint/17661/2/Study%20of%20time%20depositon%20dependence.pdf
https://eprints.ums.edu.my/id/eprint/17661/
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spelling my.ums.eprints.176612017-11-27T02:01:27Z https://eprints.ums.edu.my/id/eprint/17661/ Study oftime deposition dependence of Cu20 films,fabricated by sputtering method Norfarshah A. Rahman Q Science (General) This research was conducted to fabricate films using p-types oxides. In this research, glass which has good transparency, Is used as a substrate while CU20 is used as p-type semiconductor target CU20 films were deposited on glass substrates by Radio Frequency (RF) sputtering method at different duration time of 10, 20, 30, 40 and 50 minutes and the effect of duration time on surface, structural and optical of the films was presented. The surface properties were characterized by USing profilometer. The film structures were studied by X-ray diffraction (XRD). To obtain Information about structural properties In detail, the grain size (D) and FWHM were calculated. Optical properties of the films were analyzed by transmission, linear absorption coeffident and the optical method was used to detennine the band gap of the films. So, It was determined that duration time has a strong effect on the structural, surface and optical 2014 Academic Exercise NonPeerReviewed text en https://eprints.ums.edu.my/id/eprint/17661/2/Study%20of%20time%20depositon%20dependence.pdf Norfarshah A. Rahman (2014) Study oftime deposition dependence of Cu20 films,fabricated by sputtering method. Universiti Malaysia Sabah. (Unpublished)
institution Universiti Malaysia Sabah
building UMS Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Sabah
content_source UMS Institutional Repository
url_provider http://eprints.ums.edu.my/
language English
topic Q Science (General)
spellingShingle Q Science (General)
Norfarshah A. Rahman
Study oftime deposition dependence of Cu20 films,fabricated by sputtering method
description This research was conducted to fabricate films using p-types oxides. In this research, glass which has good transparency, Is used as a substrate while CU20 is used as p-type semiconductor target CU20 films were deposited on glass substrates by Radio Frequency (RF) sputtering method at different duration time of 10, 20, 30, 40 and 50 minutes and the effect of duration time on surface, structural and optical of the films was presented. The surface properties were characterized by USing profilometer. The film structures were studied by X-ray diffraction (XRD). To obtain Information about structural properties In detail, the grain size (D) and FWHM were calculated. Optical properties of the films were analyzed by transmission, linear absorption coeffident and the optical method was used to detennine the band gap of the films. So, It was determined that duration time has a strong effect on the structural, surface and optical
format Academic Exercise
author Norfarshah A. Rahman
author_facet Norfarshah A. Rahman
author_sort Norfarshah A. Rahman
title Study oftime deposition dependence of Cu20 films,fabricated by sputtering method
title_short Study oftime deposition dependence of Cu20 films,fabricated by sputtering method
title_full Study oftime deposition dependence of Cu20 films,fabricated by sputtering method
title_fullStr Study oftime deposition dependence of Cu20 films,fabricated by sputtering method
title_full_unstemmed Study oftime deposition dependence of Cu20 films,fabricated by sputtering method
title_sort study oftime deposition dependence of cu20 films,fabricated by sputtering method
publishDate 2014
url https://eprints.ums.edu.my/id/eprint/17661/2/Study%20of%20time%20depositon%20dependence.pdf
https://eprints.ums.edu.my/id/eprint/17661/
_version_ 1760229343155453952
score 13.211869

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