Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon
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my.um.stud.28912014-10-08T13:07:41Z Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon Liew, Wai Soon QC Physics 2001 Thesis NonPeerReviewed application/pdf http://studentsrepo.um.edu.my/2891/1/ABSTRAK.pdf application/pdf http://studentsrepo.um.edu.my/2891/2/KANDUNGAN.pdf application/pdf http://studentsrepo.um.edu.my/2891/3/PENDAHULUAN.pdf application/pdf http://studentsrepo.um.edu.my/2891/4/BAB_1.pdf application/pdf http://studentsrepo.um.edu.my/2891/5/BAB_2.pdf application/pdf http://studentsrepo.um.edu.my/2891/6/BAB_3.pdf application/pdf http://studentsrepo.um.edu.my/2891/7/BAB_4.pdf application/pdf http://studentsrepo.um.edu.my/2891/8/BAB_5.pdf application/pdf http://studentsrepo.um.edu.my/2891/9/BIBLIOGRAFI.pdf http://www.pendeta.um.edu.my/uhtbin/cgisirsi/x/P01UTAMA/0/5?searchdata1="Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system"{245} Liew, Wai Soon (2001) Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon. Masters thesis, University of Malaya . http://studentsrepo.um.edu.my/2891/ |
| institution |
Universiti Malaya |
| building |
UM Library |
| collection |
Institutional Repository |
| continent |
Asia |
| country |
Malaysia |
| content_provider |
Universiti Malaya |
| content_source |
UM Student Repository |
| url_provider |
http://studentsrepo.um.edu.my/ |
| topic |
QC Physics |
| spellingShingle |
QC Physics Liew, Wai Soon Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon |
| format |
Thesis |
| author |
Liew, Wai Soon |
| author_facet |
Liew, Wai Soon |
| author_sort |
Liew, Wai Soon |
| title |
Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon |
| title_short |
Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon |
| title_full |
Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon |
| title_fullStr |
Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon |
| title_full_unstemmed |
Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon |
| title_sort |
diamondlike carbon thin film deposition using a rf planar coil inductively coupled plasma system / liew wai soon |
| publishDate |
2001 |
| url |
http://studentsrepo.um.edu.my/2891/1/ABSTRAK.pdf http://studentsrepo.um.edu.my/2891/2/KANDUNGAN.pdf http://studentsrepo.um.edu.my/2891/3/PENDAHULUAN.pdf http://studentsrepo.um.edu.my/2891/4/BAB_1.pdf http://studentsrepo.um.edu.my/2891/5/BAB_2.pdf http://studentsrepo.um.edu.my/2891/6/BAB_3.pdf http://studentsrepo.um.edu.my/2891/7/BAB_4.pdf http://studentsrepo.um.edu.my/2891/8/BAB_5.pdf http://studentsrepo.um.edu.my/2891/9/BIBLIOGRAFI.pdf http://www.pendeta.um.edu.my/uhtbin/cgisirsi/x/P01UTAMA/0/5?searchdata1="Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system"{245} http://studentsrepo.um.edu.my/2891/ |
| _version_ |
1738505508724146176 |
| score |
13.211869 |