Formation and characterization of rare earth oxides as high-K gate dielectrics on germanium substrate / Tahsin Ahmed Mozaffor Onik
In this study, Sm2O3/Ge and Ho2O3/Ge stack based metal oxide semiconductor (MOS) capacitors were prepared from radio frequency (RF) sputtered metallic Sm on Ge sub-strate and metallic Ho on Ge substrate followed by thermal oxidation/nitridation in N2O ambient. The effects of several oxidation/nitrid...
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis |
| Published: |
2022
|
| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/15042/2/Tahsin_Ahmed.pdf http://studentsrepo.um.edu.my/15042/1/Tahsin_Ahmed.pdf http://studentsrepo.um.edu.my/15042/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|