Effect of rapid thermal annealing time on Au/SiOx film prepared by hot wire assisted plasma enhanced chemical vapour deposition technique
In this study, nanocomposite material consisting of silicon suboxide (SiOx ) film embedded with gold nanoparticles (Au NPs) was synthesized using hybrid technique combining hot wire evaporation and plasma enhanced chemical vapour deposition (PECVD) method. As prepared Au/SiOx films were rapid therma...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
Elsevier
2013
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/7523/ http://www.scopus.com/inward/record.url?eid=2-s2.0-84875326089&partnerID=40&md5=81579b7aaa05b8d800456e291914ad18 |
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