Studies on optical and photoluminescence properties of a-CNx thin films

Amorphous carbon nitride (a-CNx) thin films of different thicknesses were deposited by radio frequency plasma enhanced chemical vapour deposition technique by varying the deposition times. The refractive index, film thickness and optical energy gap were obtained from the optical transmission spectru...

Full description

Saved in:
Bibliographic Details
Main Authors: Rahman, Z.A., Ritikos, R., Rahman, S.A.
Format: Article
Published: 2009
Subjects:
Online Access:http://eprints.um.edu.my/7379/
Tags: Add Tag
No Tags, Be the first to tag this record!
id my.um.eprints.7379
record_format eprints
spelling my.um.eprints.73792015-01-02T03:19:21Z http://eprints.um.edu.my/7379/ Studies on optical and photoluminescence properties of a-CNx thin films Rahman, Z.A. Ritikos, R. Rahman, S.A. QC Physics Amorphous carbon nitride (a-CNx) thin films of different thicknesses were deposited by radio frequency plasma enhanced chemical vapour deposition technique by varying the deposition times. The refractive index, film thickness and optical energy gap were obtained from the optical transmission spectrum of the film in visible wavelength region. The photoluminescence emission intensity and wavelength due to ultraviolet excitation were studied and analysed. The effects of deposition time and film thickness on these properties were investigated. The deposition rate decreased with increasing deposition time to a stable saturation value. The optical energy gap decreased with increasing film thickness which is attributed to increase in presence of sp(2) bonding clusters in the film structure. Photoluminescence emission intensity and wavelength also showed dependence on film thickness. 2009 Article PeerReviewed Rahman, Z.A. and Ritikos, R. and Rahman, S.A. (2009) Studies on optical and photoluminescence properties of a-CNx thin films. Materials Research Innovations, 13 (3). pp. 168-170. ISSN 1432-8917 10.1179/143307509x437527
institution Universiti Malaya
building UM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaya
content_source UM Research Repository
url_provider http://eprints.um.edu.my/
topic QC Physics
spellingShingle QC Physics
Rahman, Z.A.
Ritikos, R.
Rahman, S.A.
Studies on optical and photoluminescence properties of a-CNx thin films
description Amorphous carbon nitride (a-CNx) thin films of different thicknesses were deposited by radio frequency plasma enhanced chemical vapour deposition technique by varying the deposition times. The refractive index, film thickness and optical energy gap were obtained from the optical transmission spectrum of the film in visible wavelength region. The photoluminescence emission intensity and wavelength due to ultraviolet excitation were studied and analysed. The effects of deposition time and film thickness on these properties were investigated. The deposition rate decreased with increasing deposition time to a stable saturation value. The optical energy gap decreased with increasing film thickness which is attributed to increase in presence of sp(2) bonding clusters in the film structure. Photoluminescence emission intensity and wavelength also showed dependence on film thickness.
format Article
author Rahman, Z.A.
Ritikos, R.
Rahman, S.A.
author_facet Rahman, Z.A.
Ritikos, R.
Rahman, S.A.
author_sort Rahman, Z.A.
title Studies on optical and photoluminescence properties of a-CNx thin films
title_short Studies on optical and photoluminescence properties of a-CNx thin films
title_full Studies on optical and photoluminescence properties of a-CNx thin films
title_fullStr Studies on optical and photoluminescence properties of a-CNx thin films
title_full_unstemmed Studies on optical and photoluminescence properties of a-CNx thin films
title_sort studies on optical and photoluminescence properties of a-cnx thin films
publishDate 2009
url http://eprints.um.edu.my/7379/
_version_ 1643688029875863552
score 13.211869