Photoluminescence and structural properties of silicon nanostructures grown by layer-by-layer deposition
In this study, silicon nanostructures were synthesized by layer-by-layer (LBL) method using the radio-frequency plasma enhanced chemical vapor deposition (rf PECVD) technique. The influence of the substrate temperature on the morphological, structural and photoluminescence properties of these nanost...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
2012
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/7371/ |
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