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Effects of hydrogen and helium dilution on the optical band gap and photoluminescence of DC PECVD hydrogenated amorphous carbon films

A series of hydrogenated amorphous carbon (a-C:H) thin films were deposited using home-built direct-current (DC) plasma enhanced chemical vapour deposition (PECVD) system. The a-C:H thin films were deposited using pure methane (CH 4) gas diluted either with hydrogen (H) or helium (He). The effects o...

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Main Authors: Awang, R., Rahman, Saadah Abdul
Format: Article
Published: Penerbit Universiti Kebangsaan Malaysia 2008
Subjects:
QC Physics
Online Access:http://eprints.um.edu.my/7346/
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spelling my.um.eprints.73462019-03-19T09:08:04Z http://eprints.um.edu.my/7346/ Effects of hydrogen and helium dilution on the optical band gap and photoluminescence of DC PECVD hydrogenated amorphous carbon films Awang, R. Rahman, Saadah Abdul QC Physics A series of hydrogenated amorphous carbon (a-C:H) thin films were deposited using home-built direct-current (DC) plasma enhanced chemical vapour deposition (PECVD) system. The a-C:H thin films were deposited using pure methane (CH 4) gas diluted either with hydrogen (H) or helium (He). The effects of hydrogen and helium dilution on the photoluminescence (PL) properties and optical band gap (E-04) were studied. The dependence of PL properties and optical energy gap on the film thickness has also been investigated. The characterization techniques used were optical transmission and photoluminescence spectroscopies. The sp(2) cluster sizes were determined from Raman spectra are in the range of 5 to 7 nm. Hydrogen and helium. dilution of methane strongly influences the PL efficiency of the a-C:H films. The PL efficiency are enhanced with increase in film thickness for a-C:H films prepared both from H and He diluted CH4. The optical energy gap of these films decreases with increase in H or He dilution and film thickness. Penerbit Universiti Kebangsaan Malaysia 2008 Article PeerReviewed Awang, R. and Rahman, Saadah Abdul (2008) Effects of hydrogen and helium dilution on the optical band gap and photoluminescence of DC PECVD hydrogenated amorphous carbon films. Sains Malaysiana, 37 (3). pp. 265-269. ISSN 0126-6039
institution Universiti Malaya
building UM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaya
content_source UM Research Repository
url_provider http://eprints.um.edu.my/
topic QC Physics
spellingShingle QC Physics
Awang, R.
Rahman, Saadah Abdul
Effects of hydrogen and helium dilution on the optical band gap and photoluminescence of DC PECVD hydrogenated amorphous carbon films
description A series of hydrogenated amorphous carbon (a-C:H) thin films were deposited using home-built direct-current (DC) plasma enhanced chemical vapour deposition (PECVD) system. The a-C:H thin films were deposited using pure methane (CH 4) gas diluted either with hydrogen (H) or helium (He). The effects of hydrogen and helium dilution on the photoluminescence (PL) properties and optical band gap (E-04) were studied. The dependence of PL properties and optical energy gap on the film thickness has also been investigated. The characterization techniques used were optical transmission and photoluminescence spectroscopies. The sp(2) cluster sizes were determined from Raman spectra are in the range of 5 to 7 nm. Hydrogen and helium. dilution of methane strongly influences the PL efficiency of the a-C:H films. The PL efficiency are enhanced with increase in film thickness for a-C:H films prepared both from H and He diluted CH4. The optical energy gap of these films decreases with increase in H or He dilution and film thickness.
format Article
author Awang, R.
Rahman, Saadah Abdul
author_facet Awang, R.
Rahman, Saadah Abdul
author_sort Awang, R.
title Effects of hydrogen and helium dilution on the optical band gap and photoluminescence of DC PECVD hydrogenated amorphous carbon films
title_short Effects of hydrogen and helium dilution on the optical band gap and photoluminescence of DC PECVD hydrogenated amorphous carbon films
title_full Effects of hydrogen and helium dilution on the optical band gap and photoluminescence of DC PECVD hydrogenated amorphous carbon films
title_fullStr Effects of hydrogen and helium dilution on the optical band gap and photoluminescence of DC PECVD hydrogenated amorphous carbon films
title_full_unstemmed Effects of hydrogen and helium dilution on the optical band gap and photoluminescence of DC PECVD hydrogenated amorphous carbon films
title_sort effects of hydrogen and helium dilution on the optical band gap and photoluminescence of dc pecvd hydrogenated amorphous carbon films
publisher Penerbit Universiti Kebangsaan Malaysia
publishDate 2008
url http://eprints.um.edu.my/7346/
_version_ 1643688020970307584
score 13.211869

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