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Effect of substrate temperature on gold-catalyzed silicon nanostructures growth by hot-wire chemical vapor deposition (HWCVD)

The effect of substrate temperature on the structural property of the silicon nanostructures deposited on gold-coated crystal silicon substrate by hot-wire chemical vapor deposition (HWCVD) was studied. The uniformity and size of the as-grown silicon nanostructures is highly influenced by the substr...

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Main Authors:	Chong, S.K., Goh, B.T., Aspanut, Z., Muhamad, M.R., Dee, C.F., Rahman, S.A.
格式:	Article
出版:	2011
主题:	QC Physics
在线阅读:	http://eprints.um.edu.my/7339/
标签:	添加标签没有标签, 成为第一个标记此记录!

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