Structural and mechanical properties of nanostructured TiO2 thin films deposited by RF sputtering
This study mainly aims to evaluate the effects of substrate temperatures on the mechanical properties of TiO2 thin films deposited on glass substrates by radio-frequency (RF) magnetron sputtering. All titania films possess anatase structure having a nodular morphology. AES results reveal that Si and...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
Elsevier
2010
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/5742/ https://doi.org/10.1016/j.surfcoat.2010.06.058 |
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