Optimization of the optical and electrical properties of electron beam evaporated aluminum-doped zinc oxide films for opto-electronic applications
Aluminum-doped zinc oxide (AZO) thin films have been deposited by electron beam evaporation technique on glass substrates. The structural, electrical and optical properties of AZO films have been investigated as a function of annealing temperature. It was observed that the optical properties such as...
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Main Authors: | , , , |
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Format: | Article |
Published: |
2006
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Online Access: | http://eprints.um.edu.my/5573/ http://www.sciencedirect.com/science/article/pii/S0022369706002538 |
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