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Electrical and structural comparison of (100) and (002) oriented AlN thin films deposited by RF magnetron sputtering

Aluminium nitride (AlN) thin film is a very attractive material to be used in electronic devices, and the most popular AlN orientations that have been reported are AlN (100) and AlN (002) planes. To the best of our knowledge, still less comparison study between AlN (100) with AlN (002) orientation b...

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Bibliographic Details
Main Authors: Bakri, A. S., Nafarizal, N., Abu Bakar, A. S., Hasnan, M. M. I. Megat, Raship, N. A., Omar, W. I. Wan, Azman, Z., Ali, R. A. Mohamed, Abd Majid, Wan Haliza, Ahmad, M. K., Aldalbahi, A.
Format: Article
Published: Springer 2022
Subjects:
QC Physics
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.um.edu.my/42280/
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http://eprints.um.edu.my/42280/

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